Brian Matthews

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Somerville, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer temperature trajectory control method for high temperature ra...
- Patent number 6,855,916
- Issue date Feb 15, 2005
- Axcelis Technologies, Inc.
- Brian Matthews
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
System and method for controlling movement of a workpiece in a ther...
- Patent number 6,610,968
- Issue date Aug 26, 2003
- Axcelis Technologies
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS