Brian McMillin

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Hybrid edge ring for plasma wafer processing
- Patent number 9,997,381
- Issue date Jun 12, 2018
- Lam Research Corporation
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of wet cleaning aluminum chamber parts
- Patent number 9,387,521
- Issue date Jul 12, 2016
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Pressure control valve assembly of plasma processing chamber and ra...
- Patent number 9,267,605
- Issue date Feb 23, 2016
- Lam Research Corporation
- Mirzafer Abatchev
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method for reduction of voltage potential spike during dechucking
- Patent number 8,628,675
- Issue date Jan 14, 2014
- Lam Research Corporation
- Brian McMillin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Use of spectrum to synchronize RF switching with gas switching duri...
- Patent number 8,440,473
- Issue date May 14, 2013
- Lam Research Corporation
- Qing Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reduction of voltage potential spike durin...
- Patent number 8,313,612
- Issue date Nov 20, 2012
- Lam Research Corporation
- Brian McMillin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for using an RC circuit to model trapped charge in an electr...
- Patent number 8,055,489
- Issue date Nov 8, 2011
- Lam Research Corporation
- Konstantin Makhratchev
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Multiple zone gas distribution apparatus for thermal control of sem...
- Patent number 7,156,951
- Issue date Jan 2, 2007
- Lam Research Corporation
- Qinghong K. Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
Method and apparatus for etch endpoint detection
- Patent number 7,053,994
- Issue date May 30, 2006
- Lam Research Corporation
- Brian K. McMillin
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting endpoint during plasma etching o...
- Patent number 6,908,846
- Issue date Jun 21, 2005
- Lam Research Corporation
- Brian K. McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moveable barrier for multiple etch processes
- Patent number 6,709,547
- Issue date Mar 23, 2004
- Lam Research Corporation
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma downstream strip module
- Patent number 6,692,649
- Issue date Feb 17, 2004
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma excitation coil
- Patent number 6,646,385
- Issue date Nov 11, 2003
- Lam Research Corporation
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing a silicon containing layer on a semiconductor...
- Patent number 6,626,185
- Issue date Sep 30, 2003
- Lam Research Corporation
- Alex Demos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution apparatus for semiconductor processing
- Patent number 6,508,913
- Issue date Jan 21, 2003
- Lam Research Corporation
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma excitation coil
- Patent number 6,441,555
- Issue date Aug 27, 2002
- Lam Research Corporation
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution apparatus for semiconductor processing
- Patent number 6,333,272
- Issue date Dec 25, 2001
- Lam Research Corporation
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high density plasma chemical vapor deposition of dielect...
- Patent number 6,270,862
- Issue date Aug 7, 2001
- Lam Research Corporation
- Brian McMillin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Inductively coupled plasma downstream strip module
- Patent number 6,203,657
- Issue date Mar 20, 2001
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma CVD
- Patent number 6,184,158
- Issue date Feb 6, 2001
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for pressure control in vacuum processors
- Patent number 6,142,163
- Issue date Nov 7, 2000
- Lam Research Corporation
- Brian K. McMillin
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for improving etch and deposition uniformity i...
- Patent number 6,042,687
- Issue date Mar 28, 2000
- Lam Research Corporation
- Vikram Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for plasma processing
- Patent number 6,013,155
- Issue date Jan 11, 2000
- Lam Research Corporation
- Brian McMillin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Variable high temperature chuck for high density plasma chemical va...
- Patent number 5,835,334
- Issue date Nov 10, 1998
- Lam Research
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HYBRID EDGE RING FOR PLASMA WAFER PROCESSING
- Publication number 20140235063
- Publication date Aug 21, 2014
- LAM RESEARCH CORPORATION
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
- Publication number 20140150819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
PRESSURE CONTROL VALVE ASSEMBLY OF PLASMA PROCESSING CHAMBER AND RA...
- Publication number 20130115776
- Publication date May 9, 2013
- LAM RESEARCH CORPORATION
- Mirzafer Abatchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REDUCTION OF VOLTAGE POTENTIAL SPIKE DURIN...
- Publication number 20130059447
- Publication date Mar 7, 2013
- LAM RESEARCH CORPORATION
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF SPECTRUM TO SYNCHRONIZE RF SWITCHING WITH GAS SWITCHING DURI...
- Publication number 20120309198
- Publication date Dec 6, 2012
- LAM RESEARCH CORPORATION
- Qing Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REDUCTION OF VOLTAGE POTENTIAL SPIKE DURIN...
- Publication number 20100248490
- Publication date Sep 30, 2010
- LAM RESEARCH CORPORATION
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR USING AN RC CIRCUIT TO MODEL TRAPPED CHARGE IN AN ELECTR...
- Publication number 20100085679
- Publication date Apr 8, 2010
- LAM RESEARCH CORPORATION
- Konstantin Makhratchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20060112969
- Publication date Jun 1, 2006
- Hong Shih
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR ETCH ENDPOINT DETECTION
- Publication number 20060087644
- Publication date Apr 27, 2006
- LAM RESEARCH CORPORATION
- Brian K. McMillin
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for determining endpoint in a plasma processi...
- Publication number 20060000799
- Publication date Jan 5, 2006
- Hyun-Ho Doh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled plasma downstream strip module
- Publication number 20040149223
- Publication date Aug 5, 2004
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Moveable barrier for multiple etch processes
- Publication number 20040144493
- Publication date Jul 29, 2004
- Lam Research Corporation
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparats for detecting endpoint during plasma etching of...
- Publication number 20040080050
- Publication date Apr 29, 2004
- LAM RESEARCH CORPORATION
- Brian K, McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma excitation coil
- Publication number 20030001511
- Publication date Jan 2, 2003
- Lam Research Corporation
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas distribution apparatus for semiconductor processing
- Publication number 20020042205
- Publication date Apr 11, 2002
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Inductively coupled plasma downstream strip module
- Publication number 20010023741
- Publication date Sep 27, 2001
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled plasma CVD
- Publication number 20010019903
- Publication date Sep 6, 2001
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEANING METHOD FOR SUBSTRATE PROCESSING CHAMBER US...
- Publication number 20010008138
- Publication date Jul 19, 2001
- ALEX DEMOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Brian McMillin

Person

Patents Grantslast 30 patents

Hybrid edge ring for plasma wafer processing

Method of wet cleaning aluminum chamber parts

Pressure control valve assembly of plasma processing chamber and ra...

Method for reduction of voltage potential spike during dechucking

Use of spectrum to synchronize RF switching with gas switching duri...

Method and apparatus for reduction of voltage potential spike durin...

Method for using an RC circuit to model trapped charge in an electr...

Multiple zone gas distribution apparatus for thermal control of sem...

Wet cleaning of electrostatic chucks

Method and apparatus for etch endpoint detection

Method and apparatus for detecting endpoint during plasma etching o...

Moveable barrier for multiple etch processes

Inductively coupled plasma downstream strip module

Plasma excitation coil

Method of depositing a silicon containing layer on a semiconductor...

Gas distribution apparatus for semiconductor processing

Plasma excitation coil

Gas distribution apparatus for semiconductor processing

Method for high density plasma chemical vapor deposition of dielect...

Inductively coupled plasma downstream strip module

Inductively coupled plasma CVD

Method and apparatus for pressure control in vacuum processors

Method and apparatus for improving etch and deposition uniformity i...

Gas injection system for plasma processing

Variable high temperature chuck for high density plasma chemical va...

Patents Applicationslast 30 patents

HYBRID EDGE RING FOR PLASMA WAFER PROCESSING

METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

PRESSURE CONTROL VALVE ASSEMBLY OF PLASMA PROCESSING CHAMBER AND RA...

METHOD AND APPARATUS FOR REDUCTION OF VOLTAGE POTENTIAL SPIKE DURIN...

USE OF SPECTRUM TO SYNCHRONIZE RF SWITCHING WITH GAS SWITCHING DURI...

METHOD AND APPARATUS FOR REDUCTION OF VOLTAGE POTENTIAL SPIKE DURIN...

METHOD FOR USING AN RC CIRCUIT TO MODEL TRAPPED CHARGE IN AN ELECTR...

WET CLEANING OF ELECTROSTATIC CHUCKS

METHOD AND APPARATUS FOR ETCH ENDPOINT DETECTION

Methods and apparatus for determining endpoint in a plasma processi...

Inductively coupled plasma downstream strip module

Moveable barrier for multiple etch processes

Method and apparats for detecting endpoint during plasma etching of...

Plasma excitation coil

Gas distribution apparatus for semiconductor processing

Inductively coupled plasma downstream strip module

Inductively coupled plasma CVD

IN-SITU CHAMBER CLEANING METHOD FOR SUBSTRATE PROCESSING CHAMBER US...