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Brian P. Scott
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Sachse, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Post metal etch clean process using soft mask
Patent number
6,542,282
Issue date
Apr 1, 2003
Texas Instruments Incorporated
David M. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Post metal etch clean process using soft mask
Publication number
20020126368
Publication date
Sep 12, 2002
David M. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY