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Brian S. Felker
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Allentown, PA, US
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last 30 patents
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Patent Grant
Method for plasma etching or cleaning with diluted NF.sub.3
Patent number
5,413,670
Issue date
May 9, 1995
Air Products and Chemicals, Inc.
John G. Langan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...