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Brian Sy-Yuan Sheih
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Palo Alto, CA, US
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PLASMA DIELECTRIC ETCH PROCESS INCLUDING EX-SITU BACKSIDE POLYMER R...
Publication number
20070238305
Publication date
Oct 11, 2007
APPLIED MATERIALS, INC.
Gerardo A. Delgadino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY