Brian T. West

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Automated temperature controlled substrate support
- Patent number 11,981,989
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert Hartwig
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Magnetron assembly having coolant guide for enhanced target cooling
- Patent number 11,469,080
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Dinkesh Huderi Somanna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal lift for semiconductor processing chambers
- Patent number 11,251,067
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for exhaust cooling
- Patent number 11,114,285
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-disappearing anode for use with dielectric deposition
- Patent number 11,114,289
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Michael S. Cox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-conditioned chamber components
- Patent number 11,072,852
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature biasable substrate support
- Patent number 11,056,372
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Brian T. West
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 11,011,356
- Issue date May 18, 2021
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart chamber and smart chamber components
- Patent number 10,930,479
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Simon Nicholas Binns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition in-chamber electro-magnet
- Patent number 10,867,776
- Issue date Dec 15, 2020
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cooled electrostatic chuck (ESC) having a gas channel formed th...
- Patent number 10,781,518
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 10,714,321
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for recycling substrate process components
- Patent number 10,662,520
- Issue date May 26, 2020
- Applied Materials, Inc.
- Brian T. West
- B08 - CLEANING
Information Patent Grant
Gas cooled substrate support for stabilized high temperature deposi...
- Patent number 10,344,375
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cooling a composition using a hall effect enhanced capaci...
- Patent number 10,176,973
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Michael S. Cox
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Smart chamber and smart chamber components
- Patent number 10,153,143
- Issue date Dec 11, 2018
- Applied Materials, Inc.
- Simon Nicholas Binns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 10,049,863
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support chuck cooling for deposition chamber
- Patent number 9,865,489
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cooled substrate support for stabilized high temperature deposi...
- Patent number 9,790,589
- Issue date Oct 17, 2017
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber gas flow improvements
- Patent number 9,779,917
- Issue date Oct 3, 2017
- Applied Materials, Inc.
- Stanley Detmar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 9,779,920
- Issue date Oct 3, 2017
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating a gas in a conduit
- Patent number 9,767,990
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Jibing Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Encapsulated magnetron
- Patent number 9,754,771
- Issue date Sep 5, 2017
- Applied Materials, Inc.
- Brian T. West
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Substrate support chuck cooling for deposition chamber
- Patent number 9,668,373
- Issue date May 30, 2017
- Applied Materials, Inc.
- Brian West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement system having a plasma source
- Patent number 9,552,967
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively coupled plasma source for abating compounds produced i...
- Patent number 9,543,124
- Issue date Jan 10, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a gas in a conduit
- Patent number 9,378,928
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Jibing Zeng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hall effect enhanced capacitively coupled plasma source, an abateme...
- Patent number 9,240,308
- Issue date Jan 19, 2016
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hall effect enhanced capacitively coupled plasma source
- Patent number 9,230,780
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling ring for physical vapor deposition chamber target
- Patent number 9,096,927
- Issue date Aug 4, 2015
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT
- Publication number 20220389566
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Robert HARTWIG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE BIASABLE SUBSTRATE SUPPORT
- Publication number 20200350195
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Brian T. WEST
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PEDESTAL LIFT FOR SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20200343126
- Publication date Oct 29, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20200294778
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CONDITIONED CHAMBER COMPONENTS
- Publication number 20200024725
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION IN-CHAMBER ELECTRO-MAGNET
- Publication number 20190348259
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMART CHAMBER AND SMART CHAMBER COMPONENTS
- Publication number 20190096643
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- Simon Nicholas BINNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20180342378
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RECYCLING SUBSTRATE PROCESS COMPONENTS
- Publication number 20180281027
- Publication date Oct 4, 2018
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...
- Publication number 20180037987
- Publication date Feb 8, 2018
- Applied Materials, Inc.
- Brian WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20180019108
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-DISAPPEARING ANODE FOR USE WITH DIELECTRIC DEPOSITION
- Publication number 20170316924
- Publication date Nov 2, 2017
- Applied Materials, Inc.
- Michael S. COX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR EXHAUST COOLING
- Publication number 20170301524
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER
- Publication number 20170229334
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- BRIAN WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20170133208
- Publication date May 11, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING A GAS IN A CONDUIT
- Publication number 20160300692
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- JIBING ZENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS COOLED MINIMAL CONTACT AREA(MCA) ELECTROSTATIC CHUCK(ESC) FOR A...
- Publication number 20160172226
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20160133442
- Publication date May 12, 2016
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE
- Publication number 20160118226
- Publication date Apr 28, 2016
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING A GAS IN A CONDUIT
- Publication number 20150348754
- Publication date Dec 3, 2015
- Applied Materials, Inc.
- JIBING ZENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART CHAMBER AND SMART CHAMBER COMPONENTS
- Publication number 20150262798
- Publication date Sep 17, 2015
- Applied Materials, Inc.
- Simon Nicholas BINNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE
- Publication number 20150255251
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20150255256
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...
- Publication number 20150232983
- Publication date Aug 20, 2015
- Applied Materials, Inc.
- Brian WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20150047975
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Brian T. WEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCAPSULATED MAGNETRON
- Publication number 20150048735
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Brian T. WEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER GAS FLOW IMPROVEMENTS
- Publication number 20140374509
- Publication date Dec 25, 2014
- Stanley DETMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER
- Publication number 20140268479
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- BRIAN WEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SPRAYED DEPOSITION RING ISOLATOR
- Publication number 20140102369
- Publication date Apr 17, 2014
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
- Publication number 20140076354
- Publication date Mar 20, 2014
- QUANTUM GLOBAL TECHNOLOGIES LLC
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Brian T. West

Person

Patents Grantslast 30 patents

Automated temperature controlled substrate support

Magnetron assembly having coolant guide for enhanced target cooling

Pedestal lift for semiconductor processing chambers

Apparatus for exhaust cooling

Non-disappearing anode for use with dielectric deposition

Pre-conditioned chamber components

Low temperature biasable substrate support

Sputtering target with backside cooling grooves

Smart chamber and smart chamber components

Physical vapor deposition in-chamber electro-magnet

Gas cooled electrostatic chuck (ESC) having a gas channel formed th...

Sputtering target with backside cooling grooves

Method for recycling substrate process components

Gas cooled substrate support for stabilized high temperature deposi...

Method of cooling a composition using a hall effect enhanced capaci...

Smart chamber and smart chamber components

Sputtering target with backside cooling grooves

Substrate support chuck cooling for deposition chamber

Gas cooled substrate support for stabilized high temperature deposi...

Process chamber gas flow improvements

Sputtering target with backside cooling grooves

Apparatus for treating a gas in a conduit

Encapsulated magnetron

Substrate support chuck cooling for deposition chamber

Abatement system having a plasma source

Capacitively coupled plasma source for abating compounds produced i...

Apparatus for treating a gas in a conduit

Hall effect enhanced capacitively coupled plasma source, an abateme...

Hall effect enhanced capacitively coupled plasma source

Cooling ring for physical vapor deposition chamber target

Patents Applicationslast 30 patents

AUTOMATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT

LOW TEMPERATURE BIASABLE SUBSTRATE SUPPORT

PEDESTAL LIFT FOR SEMICONDUCTOR PROCESSING CHAMBERS

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

PRE-CONDITIONED CHAMBER COMPONENTS

PHYSICAL VAPOR DEPOSITION IN-CHAMBER ELECTRO-MAGNET

SMART CHAMBER AND SMART CHAMBER COMPONENTS

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

METHOD FOR RECYCLING SUBSTRATE PROCESS COMPONENTS

GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

NON-DISAPPEARING ANODE FOR USE WITH DIELECTRIC DEPOSITION

APPARATUS FOR EXHAUST COOLING

SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

APPARATUS FOR TREATING A GAS IN A CONDUIT

GAS COOLED MINIMAL CONTACT AREA(MCA) ELECTROSTATIC CHUCK(ESC) FOR A...

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE

APPARATUS FOR TREATING A GAS IN A CONDUIT

SMART CHAMBER AND SMART CHAMBER COMPONENTS

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

ENCAPSULATED MAGNETRON

PROCESS CHAMBER GAS FLOW IMPROVEMENTS

SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER

PLASMA SPRAYED DEPOSITION RING ISOLATOR

REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS