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Brian Wayne Herbst
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Dutchess County, NY, US
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last 30 patents
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Patent Grant
Antireflective coating for microlithography
Patent number
6,207,787
Issue date
Mar 27, 2001
International Business Machines Corporation
James Thomas Fahey
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Method for patterning a photoresist material wherein an anti-reflec...
Patent number
5,736,301
Issue date
Apr 7, 1998
International Business Machines Corporation
James Thomas Fahey
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Antireflective coating for microlithography
Patent number
5,607,824
Issue date
Mar 4, 1997
International Business Machines Corporation
James T. Fahey
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...