Bruce B. McArthur

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,871,002
- Issue date Jan 18, 2011
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,871,004
- Issue date Jan 18, 2011
- Litel Instruments
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for registration with integral alignment optics
- Patent number 7,337,552
- Issue date Mar 4, 2008
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,271,905
- Issue date Sep 18, 2007
- Litel Instruments
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced dynamic step and scan intr...
- Patent number 7,268,360
- Issue date Sep 11, 2007
- Litel Instruments
- Adlai H. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reference wafer and process for manufacturing same
- Patent number 7,160,657
- Issue date Jan 9, 2007
- Litel Instruments
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for self-referenced dynamic step and scan intr...
- Patent number 7,136,144
- Issue date Nov 14, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced projection lens distortion...
- Patent number 7,099,011
- Issue date Aug 29, 2006
- Litel Instruments
- Bruce McArthur
- G02 - OPTICS
Information Patent Grant
Apparatus and method for high resolution in-situ illumination sourc...
- Patent number 7,088,427
- Issue date Aug 8, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for proper ordering of registration data
- Patent number 6,899,982
- Issue date May 31, 2005
- Litel Instruments
- Bruce McArthur
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for proper ordering of registration data
- Patent number 6,833,221
- Issue date Dec 21, 2004
- Litel Instruments
- Bruce McArthur
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
In-situ source metrology instrument and method of use
- Patent number 6,741,338
- Issue date May 25, 2004
- Litel Instruments
- Bruce B. McArthur
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 6,734,971
- Issue date May 11, 2004
- Lael Instruments
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reference wafer and process for manufacturing same
- Patent number 6,699,627
- Issue date Mar 2, 2004
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for self-referenced projection lens distortion...
- Patent number 6,573,986
- Issue date Jun 3, 2003
- Litel Instruments
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
In-situ source metrology instrument and method of use
- Patent number 6,356,345
- Issue date Mar 12, 2002
- Litel Instruments
- Bruce B. McArthur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Generalized geometric transforms for computer generated holograms
- Patent number 6,208,439
- Issue date Mar 27, 2001
- Litel Instruments
- Bruce B. McArthur
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and process for nozzle production utilizing computer gene...
- Patent number 6,130,009
- Issue date Oct 10, 2000
- Litel Instruments
- Adlai H. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus method of measurement and method of data analysis for cor...
- Patent number 5,978,085
- Issue date Nov 2, 1999
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single plate corrector for stepper lens train
- Patent number 5,929,991
- Issue date Jul 27, 1999
- Litel Instruments
- Bruce B. McArthur
- G02 - OPTICS
Information Patent Grant
Apparatus, method of measurement, and method of data analysis for c...
- Patent number 5,828,455
- Issue date Oct 27, 1998
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for ablating high density vias in flexible substrate
- Patent number 5,702,662
- Issue date Dec 30, 1997
- Litel Instruments, Inc.
- Adlai H. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Direct etch processes for the manufacture of high density modules
- Patent number 5,660,738
- Issue date Aug 26, 1997
- Litel Instruments
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plate correction technique for imaging systems
- Patent number 5,640,233
- Issue date Jun 17, 1997
- Litel Instruments
- Bruce B. McArthur
- G02 - OPTICS
Information Patent Grant
Use of fresnel zone plates for material processing
- Patent number 5,633,735
- Issue date May 27, 1997
- Litel Instruments
- Robert O. Hunter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and process for high speed laminate processing with compu...
- Patent number 5,571,429
- Issue date Nov 5, 1996
- Litel Instruments
- Adlai H. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gray level imaging masks and methods for encoding same
- Patent number 5,538,817
- Issue date Jul 23, 1996
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for optically ablated openings having designe...
- Patent number 5,539,175
- Issue date Jul 23, 1996
- Litel Instruments
- Adlai H. Smith
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser ablation control system and method
- Patent number 5,523,543
- Issue date Jun 4, 1996
- Litel Instruments
- Robert O. Hunter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Direct etch processes for the manufacture of high density multichip...
- Patent number 5,509,553
- Issue date Apr 23, 1996
- Litel Instruments
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method And Apparatus For Self-Referenced Wafer Stage Positional Err...
- Publication number 20070279607
- Publication date Dec 6, 2007
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced wafer stage positional err...
- Publication number 20060209276
- Publication date Sep 21, 2006
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced dynamic step and scan intr...
- Publication number 20060109438
- Publication date May 25, 2006
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for registration with integral alignment optics
- Publication number 20060042106
- Publication date Mar 2, 2006
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced dynamic step and scan intr...
- Publication number 20060007431
- Publication date Jan 12, 2006
- Adlai H. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for high resolution in-situ illumination sourc...
- Publication number 20050231705
- Publication date Oct 20, 2005
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced projection lens distortion...
- Publication number 20050117154
- Publication date Jun 2, 2005
- Bruce McArthur
- G02 - OPTICS
Information Patent Application
Method and apparatus for proper ordering of registration data
- Publication number 20040197678
- Publication date Oct 7, 2004
- Bruce McArthur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced wafer stage positional err...
- Publication number 20040162687
- Publication date Aug 19, 2004
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reference wafer and process for manufacturing same
- Publication number 20040157142
- Publication date Aug 12, 2004
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for self-referenced projection lens distortion...
- Publication number 20030202174
- Publication date Oct 30, 2003
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
In-situ source metrology instrument and method of use
- Publication number 20030007143
- Publication date Jan 9, 2003
- LITEL INSTRUMENTS
- Bruce B. McArthur
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for proper ordering of registration data
- Publication number 20020140917
- Publication date Oct 3, 2002
- Bruce McArthur
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Method and apparatus for self-referenced wafer stage positional err...
- Publication number 20020105649
- Publication date Aug 8, 2002
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reference wafer and process for manufacturing same
- Publication number 20020102482
- Publication date Aug 1, 2002
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Method and apparatus for self-referenced projection lens distortion...
- Publication number 20020071112
- Publication date Jun 13, 2002
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Bruce B. McArthur

Person

Patents Grantslast 30 patents

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for registration with integral alignment optics

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for self-referenced dynamic step and scan intr...

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced dynamic step and scan intr...

Method and apparatus for self-referenced projection lens distortion...

Apparatus and method for high resolution in-situ illumination sourc...

Method and apparatus for proper ordering of registration data

Method and apparatus for proper ordering of registration data

In-situ source metrology instrument and method of use

Method and apparatus for self-referenced wafer stage positional err...

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced projection lens distortion...

In-situ source metrology instrument and method of use

Generalized geometric transforms for computer generated holograms

Apparatus and process for nozzle production utilizing computer gene...

Apparatus method of measurement and method of data analysis for cor...

Single plate corrector for stepper lens train

Apparatus, method of measurement, and method of data analysis for c...

Process for ablating high density vias in flexible substrate

Direct etch processes for the manufacture of high density modules

Plate correction technique for imaging systems

Use of fresnel zone plates for material processing

Apparatus and process for high speed laminate processing with compu...

Gray level imaging masks and methods for encoding same

Apparatus and process for optically ablated openings having designe...

Laser ablation control system and method

Direct etch processes for the manufacture of high density multichip...

Patents Applicationslast 30 patents

Method And Apparatus For Self-Referenced Wafer Stage Positional Err...

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for self-referenced dynamic step and scan intr...

Method and apparatus for registration with integral alignment optics

Method and apparatus for self-referenced dynamic step and scan intr...

Apparatus and method for high resolution in-situ illumination sourc...

Method and apparatus for self-referenced projection lens distortion...

Method and apparatus for proper ordering of registration data

Method and apparatus for self-referenced wafer stage positional err...

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced projection lens distortion...

In-situ source metrology instrument and method of use

Method and apparatus for proper ordering of registration data

Method and apparatus for self-referenced wafer stage positional err...

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced projection lens distortion...