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Bruno Lichtenegger
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Burgkirchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Process for the surface polishing of silicon wafers
Patent number
6,530,826
Issue date
Mar 11, 2003
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Guido Wenski
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Process for the surface polishing of silicon wafers
Publication number
20020077039
Publication date
Jun 20, 2002
WACKER, SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG
Guido Wenski
H01 - BASIC ELECTRIC ELEMENTS