Bruno Morel

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 8,859,432
- Issue date Oct 14, 2014
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 8,313,635
- Issue date Nov 20, 2012
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 7,811,409
- Issue date Oct 12, 2010
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING
Information Patent Grant
Apparatus and methods for detecting transitions of wafer surface pr...
- Patent number 6,937,915
- Issue date Aug 30, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for detecting transitions of wafer surface properties in ch...
- Patent number 6,925,348
- Issue date Aug 2, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated load simulator
- Patent number 6,490,536
- Issue date Dec 3, 2002
- Lam Research Corporation
- Albert R. Ellingboe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer area pressure control
- Patent number 6,433,484
- Issue date Aug 13, 2002
- Lam Research Corporation
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
- Publication number 20130056022
- Publication date Mar 7, 2013
- LAM RESEARCH CORPORATION
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...
- Publication number 20110146909
- Publication date Jun 23, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
- Publication number 20100319813
- Publication date Dec 23, 2010
- LAM RESEARCH CORPORATION
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bare aluminum baffles for resist stripping chambers
- Publication number 20080178906
- Publication date Jul 31, 2008
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20060112969
- Publication date Jun 1, 2006
- Hong Shih
- B08 - CLEANING
Information Patent Application
Bare aluminum baffles for resist stripping chambers
- Publication number 20050284573
- Publication date Dec 29, 2005
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for wet cleaning quartz surfaces of components for plasma p...
- Publication number 20050274396
- Publication date Dec 15, 2005
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for cleaning a set of structures comprising yttrium oxide i...
- Publication number 20050161061
- Publication date Jul 28, 2005
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for detecting transitions of wafer surface properties in ch...
- Publication number 20050054268
- Publication date Mar 10, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING

Bruno Morel

Person

Patents Grantslast 30 patents

Bare aluminum baffles for resist stripping chambers

Bare aluminum baffles for resist stripping chambers

Bare aluminum baffles for resist stripping chambers

Wet cleaning of electrostatic chucks

Apparatus and methods for detecting transitions of wafer surface pr...

Methods for detecting transitions of wafer surface properties in ch...

Integrated load simulator

Wafer area pressure control

Patents Applicationslast 30 patents

BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS

METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...

BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS

Bare aluminum baffles for resist stripping chambers

WET CLEANING OF ELECTROSTATIC CHUCKS

Bare aluminum baffles for resist stripping chambers

Methods for wet cleaning quartz surfaces of components for plasma p...

Methods for cleaning a set of structures comprising yttrium oxide i...

Methods for detecting transitions of wafer surface properties in ch...