Bruno Spuler

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Munich, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming dual damascene structure
- Patent number 6,521,542
- Issue date Feb 18, 2003
- International Business Machines Corp.
- Mike Armacost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metallization etching techniques for reducing post-etch corrosion o...
- Patent number 6,177,353
- Issue date Jan 23, 2001
- Infineon Technologies North America Corp.
- Martin Gutsche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low pressure and low power C1.sub.2 /HC1 process for sub-micron met...
- Patent number 5,976,986
- Issue date Nov 2, 1999
- International Business Machines Corp.
- Munir D. Naeem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polycide etching with HCL and chlorine
- Patent number 5,874,363
- Issue date Feb 23, 1999
- Kabushiki Kaisha Toshiba
- Peter D. Hoh
- H01 - BASIC ELECTRIC ELEMENTS