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Bryan A. Helmer
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method of plasma etching low-k dielectric materials
Patent number
7,311,852
Issue date
Dec 25, 2007
Lam Research Corporation
Si Yi Li
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Profile control of oxide trench features for dual damascene applica...
Patent number
6,540,885
Issue date
Apr 1, 2003
LAM Research Corp.
Douglas Keil
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of plasma etching low-k dielectric materials
Publication number
20030024902
Publication date
Feb 6, 2003
Si Yi Li
H01 - BASIC ELECTRIC ELEMENTS