Bryan C. Hendrix

Person

Danbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon precursor compounds and method for forming silicon-containi...
- Patent number 12,264,392
- Issue date Apr 1, 2025
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten or molybdenum films
- Patent number 12,252,787
- Issue date Mar 18, 2025
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 12,237,170
- Issue date Feb 25, 2025
- Entegris, Inc.
- Sangbum Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition precursor compounds and process of use
- Patent number 12,209,105
- Issue date Jan 28, 2025
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,084,778
- Issue date Sep 10, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and methods for preparing silicon-containing films
- Patent number 12,071,688
- Issue date Aug 27, 2024
- Entegris, Inc.
- SangJin Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 12,037,681
- Issue date Jul 16, 2024
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,018,382
- Issue date Jun 25, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition processes using ruthenium precursor and r...
- Patent number 11,987,878
- Issue date May 21, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for nucleation of conductive nitride films
- Patent number 11,965,239
- Issue date Apr 23, 2024
- Entegris, Inc.
- Gavin Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxyhalide precursors
- Patent number 11,919,780
- Issue date Mar 5, 2024
- Entegris, Inc.
- David M. Ermert
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vaporization vessel and method
- Patent number 11,821,087
- Issue date Nov 21, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 11,804,375
- Issue date Oct 31, 2023
- Entegris, Inc.
- Sangbum Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten or molybdenum films
- Patent number 11,761,081
- Issue date Sep 19, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,746,413
- Issue date Sep 5, 2023
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma immersion methods for ion implantation
- Patent number 11,621,148
- Issue date Apr 4, 2023
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...
- Patent number 11,560,625
- Issue date Jan 24, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition precursor compounds and process of use
- Patent number 11,466,038
- Issue date Oct 11, 2022
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical delivery system and method of operating the chemical deliv...
- Patent number 11,421,320
- Issue date Aug 23, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming carbon rich silicon-containing films
- Patent number 11,414,750
- Issue date Aug 16, 2022
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon nitride
- Patent number 11,380,539
- Issue date Jul 5, 2022
- Entegris, Inc.
- Han Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition processes using ruthenium precursor and r...
- Patent number 11,371,138
- Issue date Jun 28, 2022
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD Mo deposition by using MoOCl4
- Patent number 11,107,675
- Issue date Aug 31, 2021
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat transfer to ampoule trays
- Patent number 10,895,347
- Issue date Jan 19, 2021
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solid precursor-based delivery of fluid utilizing controlled solids...
- Patent number 10,895,010
- Issue date Jan 19, 2021
- Entegris, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...
- Patent number 10,872,770
- Issue date Dec 22, 2020
- Entegris, Inc.
- Sangbum Han
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Alloys of Co to reduce stress
- Patent number 10,793,947
- Issue date Oct 6, 2020
- Entegris, Inc.
- Philip S. H. Chen
- B32 - LAYERED PRODUCTS
Information Patent Grant
In-situ oxidized NiO as electrode surface for high k MIM device
- Patent number 10,475,575
- Issue date Nov 12, 2019
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature molybdenum film deposition utilizing boron nucleati...
- Patent number 10,453,744
- Issue date Oct 22, 2019
- Entegris, Inc.
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid vaporizer
- Patent number 10,392,700
- Issue date Aug 27, 2019
- Entegris, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FORMING FILMS WITH IMPROVED STEP COVERAGE
- Publication number 20250075314
- Publication date Mar 6, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF IMPROVING METAL OXIDE DEPOSITION WITH NITROGEN OXIDE AND...
- Publication number 20250079157
- Publication date Mar 6, 2025
- Entegris, Inc.
- Rong Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSERS IN VAPORIZERS AND RELATED METHODS
- Publication number 20250020282
- Publication date Jan 16, 2025
- Entegris, Inc.
- Scott L. Battle
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL
- Publication number 20250019822
- Publication date Jan 16, 2025
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...
- Publication number 20250003072
- Publication date Jan 2, 2025
- Entegris, Inc.
- Joseph E. Reynolds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE RUTHENIUM DEPOSITION AND RELATED SYSTEMS AND METHODS
- Publication number 20240412981
- Publication date Dec 12, 2024
- Entegris, Inc.
- Phil S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM PRECURSORS AND RELATED METHODS
- Publication number 20240190718
- Publication date Jun 13, 2024
- Entegris, Inc.
- Loren Press
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...
- Publication number 20240170290
- Publication date May 23, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXHALIDE PRECURSORS
- Publication number 20240140819
- Publication date May 2, 2024
- Entegris, Inc.
- David M. ERMERT
- C01 - INORGANIC CHEMISTRY
Information Patent Application
TUNGSTEN PRECURSORS AND RELATED METHODS
- Publication number 20240123391
- Publication date Apr 18, 2024
- Entegris, Inc.
- Robert Wright
- C01 - INORGANIC CHEMISTRY
Information Patent Application
TUNGSTEN PRECURSORS AND RELATED METHODS
- Publication number 20240116774
- Publication date Apr 11, 2024
- Entegris, Inc.
- Loren Press
- C01 - INORGANIC CHEMISTRY
Information Patent Application
HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...
- Publication number 20240096631
- Publication date Mar 21, 2024
- Entegris, Inc.
- Sangbum Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZATION VESSEL AND METHOD
- Publication number 20240084452
- Publication date Mar 14, 2024
- Entegris, Inc.
- Bryan C. HENDRIX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS
- Publication number 20240035157
- Publication date Feb 1, 2024
- Entegris, Inc.
- Robert WRIGHT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION FILL PROCESS FOR SOLID CHEMISTRIES
- Publication number 20240002081
- Publication date Jan 4, 2024
- Entegris, Inc.
- Benjamin H. Olson
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS
- Publication number 20230416913
- Publication date Dec 28, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS
- Publication number 20230366085
- Publication date Nov 16, 2023
- Entegris, Inc.
- Benjamin Harrison Olson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR
- Publication number 20230287564
- Publication date Sep 14, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PROCESS FOR PREPARING SILICON-RICH SILICON NITRIDE FILMS
- Publication number 20230279545
- Publication date Sep 7, 2023
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR SELECTIVELY DEPOSITING HIGHLY-CONDUCTIVE METAL FILMS
- Publication number 20230245894
- Publication date Aug 3, 2023
- Entegris, Inc.
- Philip S.H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF SILICON NITRIDE WITH ENHANCED SELECTIVITY
- Publication number 20230187202
- Publication date Jun 15, 2023
- Entegris, Inc.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VAPOR PRESSURE DELIVERY SYSTEM
- Publication number 20230130079
- Publication date Apr 27, 2023
- Entegris, Inc.
- Scott L. Battle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...
- Publication number 20230128330
- Publication date Apr 27, 2023
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPRESSIBLE TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER
- Publication number 20230115177
- Publication date Apr 13, 2023
- Entegris, Inc.
- Scott L. Battle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE
- Publication number 20230041086
- Publication date Feb 9, 2023
- Entegris, Inc.
- Philip S.H. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
- Publication number 20220364225
- Publication date Nov 17, 2022
- Entegris, Inc.
- Sungsil CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINI...
- Publication number 20220359192
- Publication date Nov 10, 2022
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION PROCESS
- Publication number 20220316055
- Publication date Oct 6, 2022
- Entegris, Inc.
- Han Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...
- Publication number 20220298629
- Publication date Sep 22, 2022
- Entegris, Inc.
- David James Eldridge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND R...
- Publication number 20220267895
- Publication date Aug 25, 2022
- Entegris, Inc.
- Philip S.H. CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bryan C. Hendrix

Person

Patents Grantslast 30 patents

Silicon precursor compounds and method for forming silicon-containi...

Methods for depositing tungsten or molybdenum films

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Vapor deposition precursor compounds and process of use

Coatings for enhancement of properties and performance of substrate...

Precursors and methods for preparing silicon-containing films

Method for forming carbon rich silicon-containing films

Coatings for enhancement of properties and performance of substrate...

Chemical vapor deposition processes using ruthenium precursor and r...

Method for nucleation of conductive nitride films

Oxyhalide precursors

Vaporization vessel and method

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Methods for depositing tungsten or molybdenum films

Chemical delivery system and method of operating the chemical deliv...

Plasma immersion methods for ion implantation

Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum...

Vapor deposition precursor compounds and process of use

Chemical delivery system and method of operating the chemical deliv...

Method for forming carbon rich silicon-containing films

Selective deposition of silicon nitride

Chemical vapor deposition processes using ruthenium precursor and r...

CVD Mo deposition by using MoOCl4

Heat transfer to ampoule trays

Solid precursor-based delivery of fluid utilizing controlled solids...

Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor dep...

Alloys of Co to reduce stress

In-situ oxidized NiO as electrode surface for high k MIM device

Low temperature molybdenum film deposition utilizing boron nucleati...

Solid vaporizer

Patents Applicationslast 30 patents

FORMING FILMS WITH IMPROVED STEP COVERAGE

METHODS OF IMPROVING METAL OXIDE DEPOSITION WITH NITROGEN OXIDE AND...

DIFFUSERS IN VAPORIZERS AND RELATED METHODS

METAL GETTERS IN VAPORIZERS FOR IMPURITY REMOVAL

HIGH PURITY MOLYBDENUM-CONTAINING PRECURSORS AND RELATED SYSTEMS AN...

SELECTIVE RUTHENIUM DEPOSITION AND RELATED SYSTEMS AND METHODS

MOLYBDENUM PRECURSORS AND RELATED METHODS

METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...

OXHALIDE PRECURSORS

TUNGSTEN PRECURSORS AND RELATED METHODS

TUNGSTEN PRECURSORS AND RELATED METHODS

HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEP...

VAPORIZATION VESSEL AND METHOD

METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS

VIBRATION FILL PROCESS FOR SOLID CHEMISTRIES

MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS

TRAY ASSEMBLIES FOR PRECURSOR DELIVERY SYSTEMS AND RELATED METHODS

DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR

PROCESS FOR PREPARING SILICON-RICH SILICON NITRIDE FILMS

PROCESS FOR SELECTIVELY DEPOSITING HIGHLY-CONDUCTIVE METAL FILMS

DEPOSITION OF SILICON NITRIDE WITH ENHANCED SELECTIVITY

HIGH VAPOR PRESSURE DELIVERY SYSTEM

VAPOR DEPOSITION OF MOLYBDENUM USING A BIS(ALKYL-ARENE) MOLYBDENUM...

COMPRESSIBLE TRAY FOR SOLID CHEMICAL VAPORIZING CHAMBER

VAPOR DEPOSITION PRECURSOR COMPOUNDS AND PROCESS OF USE

METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS

SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINI...

LOW TEMPERATURE DEPOSITION PROCESS

CHEMICAL DELIVERY SYSTEM AND METHOD OF OPERATING THE CHEMICAL DELIV...

CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND R...