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Bryan Christofferson
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Orange, CA, US
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last 30 patents
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Patent Grant
Systems and methods for controlling temperatures of process tools
Patent number
6,783,080
Issue date
Aug 31, 2004
Advanced Thermal Sciences Corp.
Matthew Antoniou
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
Systems and methods for controlling temperatures of process tools
Publication number
20040035851
Publication date
Feb 26, 2004
Matthew Antoniou
G05 - CONTROLLING REGULATING