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Bryan D. Schmidt
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San Antonio, TX, US
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last 30 patents
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Patent Grant
Method and apparatus for removing particles from semiconductor wafe...
Patent number
5,972,051
Issue date
Oct 26, 1999
VLSI Technology, Inc.
Pierre Leroux
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer defect monitoring
Patent number
5,392,113
Issue date
Feb 21, 1995
VLSI Technology, Inc.
Anthony Sayka
G01 - MEASURING TESTING
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Patent Grant
Electrostatic apparatus and method for removing particles from semi...
Patent number
5,350,428
Issue date
Sep 27, 1994
VLSI Technology, Inc.
Pierre Leroux
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for thermally insulating a wafer support
Patent number
5,343,938
Issue date
Sep 6, 1994
VLSI Technology, Inc.
Bryan D. Schmidt
F28 - HEAT EXCHANGE IN GENERAL