Bryan Pu

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Temperature adjusting apparatus and method for a focus ring
- Patent number 10,593,520
- Issue date Mar 17, 2020
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Lei Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE ADJUSTING APPARATUS AND METHOD FOR A FOCUS RING
- Publication number 20170186590
- Publication date Jun 29, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Lei Wu
- H01 - BASIC ELECTRIC ELEMENTS