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Bryan TONG-MINH
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Eindhoven, NL
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last 30 patents
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Patent Grant
Encoder, position measurement system and lithographic apparatus inv...
Patent number
10,768,025
Issue date
Sep 8, 2020
ASML Netherlands B.V.
Wouter Onno Pril
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
ENCODER, POSITION MEASUREMENT SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20170343390
Publication date
Nov 30, 2017
ASML NETHERLANDS B.V.
Wouter Onno PRIL
G01 - MEASURING TESTING