Bu-Chin CHUNG

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for controlling wafer and thin film surface tempe...
- Patent number 9,617,636
- Issue date Apr 11, 2017
- Hermes-Epitek Corporation
- Chung-Yuan Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for manufacturing semiconductor epitaxy structure
- Patent number 9,613,875
- Issue date Apr 4, 2017
- Hermes-Epitek Corp.
- Takashi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for curvature and thin film stress measurement
- Patent number 9,551,569
- Issue date Jan 24, 2017
- Hermes-Epitek Corporation
- Chung-Yuan Wu
- G02 - OPTICS
Information Patent Grant
Method and system for manufacturing semiconductor epitaxy structure
- Patent number 9,406,536
- Issue date Aug 2, 2016
- Hermes-Epitek Corp.
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating flash memory cell
- Patent number 5,837,585
- Issue date Nov 17, 1998
- Vanguard International Semiconductor Corporation
- Shye-Lin Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch back method to planarize an interlayer having a critical HDP-C...
- Patent number 5,814,564
- Issue date Sep 29, 1998
- Vanguard International Semiconductor Corporation
- Liang-Gi Yao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS DISTRIBUTING INJECTOR APPLIED IN MOCVD REACTOR
- Publication number 20170314131
- Publication date Nov 2, 2017
- HERMES-EPITEK CORPORATION
- Po-Jung Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHOD OF SEMICONDUCTOR MULTILAYER STRUCTURE
- Publication number 20170117136
- Publication date Apr 27, 2017
- HERMES-EPITEK CORP.
- Takashi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR EPITAXY STRUCTURE
- Publication number 20160379904
- Publication date Dec 29, 2016
- HERMES-EPITEK CORP.
- TAKASHI KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MULTILAYER STRUCTURE AND FABRICATION METHOD THEREOF
- Publication number 20160293399
- Publication date Oct 6, 2016
- HERMES-EPITEK CORP.
- Takashi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TEMPLATE AND MANUFACTURING METHOD THEREOF
- Publication number 20160247886
- Publication date Aug 25, 2016
- HERMES-EPITEK CORP.
- Po-Jung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING WAFER AND THIN FILM SURFACE TEMPE...
- Publication number 20160148803
- Publication date May 26, 2016
- HERMES-EPITEK CORPORATION
- CHUNG-YUAN WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CURVATURE AND THIN FILM STRESS MEASUREMENT
- Publication number 20160102968
- Publication date Apr 14, 2016
- HERMES-EPITEK CORPORATION
- Chung-Yuan WU
- G02 - OPTICS
Information Patent Application
VAPOR PHASE FILM DEPOSITION APPARATUS
- Publication number 20150096496
- Publication date Apr 9, 2015
- HERMES-EPITEK CORPORATION
- Noboru SUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bu-Chin CHUNG

Person

Patents Grantslast 30 patents

System and method for controlling wafer and thin film surface tempe...

Method and system for manufacturing semiconductor epitaxy structure

Apparatus and method for curvature and thin film stress measurement

Method and system for manufacturing semiconductor epitaxy structure

Method of fabricating flash memory cell

Etch back method to planarize an interlayer having a critical HDP-C...

Patents Applicationslast 30 patents

GAS DISTRIBUTING INJECTOR APPLIED IN MOCVD REACTOR

FABRICATION METHOD OF SEMICONDUCTOR MULTILAYER STRUCTURE

METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR EPITAXY STRUCTURE

SEMICONDUCTOR MULTILAYER STRUCTURE AND FABRICATION METHOD THEREOF

SEMICONDUCTOR TEMPLATE AND MANUFACTURING METHOD THEREOF

SYSTEM AND METHOD FOR CONTROLLING WAFER AND THIN FILM SURFACE TEMPE...

APPARATUS AND METHOD FOR CURVATURE AND THIN FILM STRESS MEASUREMENT

VAPOR PHASE FILM DEPOSITION APPARATUS