Bubesh Babu Jotheeswaran

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Gilbert, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing preclean methods and apparatus
- Patent number 12,112,938
- Issue date Oct 8, 2024
- ASM IP Holding B.V.
- Chuang Wei
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS
- Publication number 20230324227
- Publication date Oct 12, 2023
- ASM IP HOLDING, B.V.
- Ernesto Suarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...
- Publication number 20220367175
- Publication date Nov 17, 2022
- ASM IP HOLDING B.V.
- Xing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING PRECLEAN METHODS AND APPARATUS
- Publication number 20220301856
- Publication date Sep 22, 2022
- ASM IP HOLDING B.V.
- Chuang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR USE WITH HYDROGEN RADICALS AND METHOD OF USING SAME
- Publication number 20190348261
- Publication date Nov 14, 2019
- ASM IP HOLDING B.V.
- Xing Lin
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...
- Publication number 20190019670
- Publication date Jan 17, 2019
- ASM IP HOLDING B.V.
- Xing Lin
- B08 - CLEANING