Budi Hartono

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Optical measurement of step size and plated metal thickness
- Patent number 10,359,613
- Issue date Jul 23, 2019
- KLA-Tencor Corporation
- James Jianguo Xu
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL MEASUREMENT OF STEP SIZE AND PLATED METAL THICKNESS
- Publication number 20180045946
- Publication date Feb 15, 2018
- Zeta Instruments, Inc.
- James Jianguo Xu
- G02 - OPTICS