Budiman Sutedja

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Venlo, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 7,626,681
- Issue date Dec 1, 2009
- ASML Netherlands B.V.
- Budiman Sutedja
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,567,340
- Issue date Jul 28, 2009
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080085462
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring the bonding of bonded substrates
- Publication number 20080083818
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic apparatus and method
- Publication number 20070146679
- Publication date Jun 28, 2007
- ASML NETHERLANDS B.V.
- Budiman Sutedja
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY