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Bunji Mizuno
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Ikoma, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,502,220
Issue date
Nov 22, 2016
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method and plasma doping apparatus
Patent number
8,709,926
Issue date
Apr 29, 2014
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method with gate shutter
Patent number
8,652,953
Issue date
Feb 18, 2014
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a semiconductor device have fin-shaped semicon...
Patent number
8,536,000
Issue date
Sep 17, 2013
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
8,409,939
Issue date
Apr 2, 2013
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
8,404,573
Issue date
Mar 26, 2013
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
8,288,259
Issue date
Oct 16, 2012
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping device with gate shutter
Patent number
8,257,501
Issue date
Sep 4, 2012
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
8,258,585
Issue date
Sep 4, 2012
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities and apparatus for introducing imp...
Patent number
8,222,128
Issue date
Jul 17, 2012
Panasonic Corporation
Yuichiro Sasaki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for fabricating semiconductor device and plasma doping system
Patent number
8,193,080
Issue date
Jun 5, 2012
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impurity introducing apparatus having feedback mechanism using opti...
Patent number
8,138,582
Issue date
Mar 20, 2012
Panasonic Corporation
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method and apparatus
Patent number
8,129,202
Issue date
Mar 6, 2012
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
8,124,507
Issue date
Feb 28, 2012
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a semiconductor device by plasma doping a semi...
Patent number
8,105,926
Issue date
Jan 31, 2012
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for producing the same
Patent number
8,063,437
Issue date
Nov 22, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,030,187
Issue date
Oct 4, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device using plasma doping
Patent number
8,012,862
Issue date
Sep 6, 2011
Panasonic Corporation
Katsumi Okashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for producing the same
Patent number
8,004,045
Issue date
Aug 23, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making junction and processed material formed using the...
Patent number
7,981,779
Issue date
Jul 19, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping apparatus and method, and method for manufacturing se...
Patent number
7,972,945
Issue date
Jul 5, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method and plasma doping apparatus
Patent number
7,939,388
Issue date
May 10, 2011
Panasonic Corporation
Tomohiro Okumura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for fabricating semiconductor device
Patent number
7,932,185
Issue date
Apr 26, 2011
Sumitomo Heavy Industries, Ltd.
Toshio Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam current sensor
Patent number
7,888,937
Issue date
Feb 15, 2011
Riken
Tamaki Watanabe
G01 - MEASURING TESTING
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Patent Grant
Plasma doping method and apparatus employed in the same
Patent number
7,871,853
Issue date
Jan 18, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method and plasma doping apparatus
Patent number
7,863,168
Issue date
Jan 4, 2011
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and apparatus
Patent number
7,858,537
Issue date
Dec 28, 2010
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
7,858,155
Issue date
Dec 28, 2010
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of fabricating semiconductor device
Patent number
7,858,479
Issue date
Dec 28, 2010
Panasonic Corporation
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping processing device and method thereof
Patent number
7,820,230
Issue date
Oct 26, 2010
Panasonic Corporation
Keiichi Nakamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160064196
Publication date
Mar 3, 2016
Panasonic Intellectual Property Management Co., Ltd.
Shogo OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20130337641
Publication date
Dec 19, 2013
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20130323916
Publication date
Dec 5, 2013
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20130175586
Publication date
Jul 11, 2013
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
Publication number
20130022759
Publication date
Jan 24, 2013
PANASONIC CORPORATION
Tomohiro OKUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD WITH GATE SHUTTER
Publication number
20120285818
Publication date
Nov 15, 2012
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20120186519
Publication date
Jul 26, 2012
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20120119295
Publication date
May 17, 2012
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SAME
Publication number
20120015504
Publication date
Jan 19, 2012
PANASONIC CORPORATION
Yuichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVE FIN-SHAPED SEMICON...
Publication number
20110275201
Publication date
Nov 10, 2011
PANASONIC CORPORATION
Yuichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20110272763
Publication date
Nov 10, 2011
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MAKING JUNCTION AND PROCESSED MATERIAL FORMED USING THE...
Publication number
20110237056
Publication date
Sep 29, 2011
PANASONIC CORPORATION
Yuichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20110217830
Publication date
Sep 8, 2011
PANASONIC CORPORATION
Tomohiro OKUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PLASMA DOPING SYSTEM
Publication number
20110151652
Publication date
Jun 23, 2011
Yuichiro Sssaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20110147856
Publication date
Jun 23, 2011
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20110147813
Publication date
Jun 23, 2011
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
Publication number
20110081787
Publication date
Apr 7, 2011
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20110065266
Publication date
Mar 17, 2011
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Doping Method and Plasma Doping Apparatus
Publication number
20110065267
Publication date
Mar 17, 2011
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SAME
Publication number
20100330782
Publication date
Dec 30, 2010
PANASONIC CORPORATION
Yuichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING APPARATUS AND METHOD, AND METHOD FOR MANUFACTURING SE...
Publication number
20100297836
Publication date
Nov 25, 2010
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20100255615
Publication date
Oct 7, 2010
Katsumi Okashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20100207211
Publication date
Aug 19, 2010
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INTRODUCING IMPURITIES AND APPARATUS FOR INTRODUCING IMP...
Publication number
20100167508
Publication date
Jul 1, 2010
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPURITY INTRODUCING METHOD USING OPTICAL CHARACTERISTICS TO DETERM...
Publication number
20100148323
Publication date
Jun 17, 2010
PANASONIC CORPORATION
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20100098837
Publication date
Apr 22, 2010
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR PRODUCI...
Publication number
20100075489
Publication date
Mar 25, 2010
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20100015788
Publication date
Jan 21, 2010
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20100009469
Publication date
Jan 14, 2010
Takayuki Kai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA DOPING PROCESSING DEVICE AND METHOD THEREOF
Publication number
20090317963
Publication date
Dec 24, 2009
Keiichi Nakamoto
H01 - BASIC ELECTRIC ELEMENTS