Bunsen Nie

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Conformal titanium nitride-based thin films and methods of forming...
- Patent number 12,165,918
- Issue date Dec 10, 2024
- Eugenus, Inc.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smooth titanium nitride layers and methods of forming the same
- Patent number 11,587,784
- Issue date Feb 21, 2023
- Eugenus, Inc.
- Sung-Hoon Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal and smooth titanium nitride layers and methods of forming...
- Patent number 11,482,413
- Issue date Oct 25, 2022
- Eugenus, Inc.
- Sung-Hoon Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal titanium nitride-based thin films and methods of forming...
- Patent number 11,361,992
- Issue date Jun 14, 2022
- Eugenus, Inc.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential deposition/anneal film densification method
- Patent number 7,790,633
- Issue date Sep 7, 2010
- Novellus Systems, Inc.
- Raihan M. Tarafdar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for modulation of precursor exposure during a...
- Patent number 7,700,155
- Issue date Apr 20, 2010
- Novellus Systems, Inc.
- Francisco Juarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming low-temperature conformal dielectric films
- Patent number 7,678,709
- Issue date Mar 16, 2010
- Novellus Systems, Inc.
- Brian Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal nanolaminate dielectric deposition and etch bag gap fill...
- Patent number 7,482,247
- Issue date Jan 27, 2009
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling properties of conformal silica nanolaminates...
- Patent number 7,297,608
- Issue date Nov 20, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the use of alkoxysilanol precursors for vapor depositio...
- Patent number 7,294,583
- Issue date Nov 13, 2007
- Novellus Systems, Inc.
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic rapid vapor deposition process for conformal silica laminates
- Patent number 7,223,707
- Issue date May 29, 2007
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silica thin films produced by rapid surface catalyzed vapor deposit...
- Patent number 7,202,185
- Issue date Apr 10, 2007
- Novellus Systems, Inc.
- Dennis M. Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential deposition/anneal film densification method
- Patent number 7,148,155
- Issue date Dec 12, 2006
- Novellus Systems, Inc.
- Raihan M. Tarafdar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum phosphate incorporation in silica thin films produced by r...
- Patent number 7,129,189
- Issue date Oct 31, 2006
- Novellus Systems, Inc.
- Dennis M. Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixed alkoxy precursors and methods of their use for rapid vapor de...
- Patent number 7,097,878
- Issue date Aug 29, 2006
- Novellus Systems, Inc.
- Ron Rulkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Properties of a silica thin film produced by a rapid vapor depositi...
- Patent number 6,867,152
- Issue date Mar 15, 2005
- Novellus Systems, Inc.
- Dennis M. Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric films with low dielectric constants
- Patent number 6,576,345
- Issue date Jun 10, 2003
- Patrick A. Van Cleemput
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method to deposit SiOCH films with dielectric constant below 3.0
- Patent number 6,340,628
- Issue date Jan 22, 2002
- Novellus Systems, Inc.
- Patrick A. Van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...
- Publication number 20240124978
- Publication date Apr 18, 2024
- EUGENUS, INC.
- Behzad Mahmoudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME
- Publication number 20230395369
- Publication date Dec 7, 2023
- EUGENUS, INC.
- Sung-Hoon Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...
- Publication number 20230215725
- Publication date Jul 6, 2023
- EUGENUS, INC.
- Sung-Hoon Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL TITANIUM NITRIDE-BASED THIN FILMS AND METHODS OF FORMING...
- Publication number 20220415709
- Publication date Dec 29, 2022
- EUGENUS, INC.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL TITANIUM SILICON NITRIDE-BASED THIN FILMS AND METHODS OF...
- Publication number 20220301928
- Publication date Sep 22, 2022
- EUGENUS, INC.
- Hae Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL TITANIUM SILICON NITRIDE-BASED THIN FILMS AND METHODS OF...
- Publication number 20220301929
- Publication date Sep 22, 2022
- EUGENUS, INC.
- Ajit Dhamdhere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...
- Publication number 20220216060
- Publication date Jul 7, 2022
- EUGENUS, INC.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...
- Publication number 20220172988
- Publication date Jun 2, 2022
- EUGENUS, INC.
- Hyunchol Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME
- Publication number 20210104397
- Publication date Apr 8, 2021
- EUGENUS, INC.
- Sung-Hoon Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL TITANIUM NITRIDE-BASED THIN FILMS AND METHODS OF FORMING...
- Publication number 20210104433
- Publication date Apr 8, 2021
- EUGENUS, INC.
- Niloy Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...
- Publication number 20210104396
- Publication date Apr 8, 2021
- EUGENUS, INC.
- Sung-Hoon Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MODULATION OF PRECURSOR EXPOSURE DURING A...
- Publication number 20100173074
- Publication date Jul 8, 2010
- NOVELLUS SYSTEMS INC.
- Francisco Juarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Conformal titanium nitride-based thin films and methods of forming...

Smooth titanium nitride layers and methods of forming the same

Conformal and smooth titanium nitride layers and methods of forming...

Conformal titanium nitride-based thin films and methods of forming...

Sequential deposition/anneal film densification method

Method and apparatus for modulation of precursor exposure during a...

Method of forming low-temperature conformal dielectric films

Conformal nanolaminate dielectric deposition and etch bag gap fill...

Method for controlling properties of conformal silica nanolaminates...

Methods for the use of alkoxysilanol precursors for vapor depositio...

Dynamic rapid vapor deposition process for conformal silica laminates

Silica thin films produced by rapid surface catalyzed vapor deposit...

Sequential deposition/anneal film densification method

Aluminum phosphate incorporation in silica thin films produced by r...

Mixed alkoxy precursors and methods of their use for rapid vapor de...

Properties of a silica thin film produced by a rapid vapor depositi...

Dielectric films with low dielectric constants

Method to deposit SiOCH films with dielectric constant below 3.0

Patents Applicationslast 30 patents

GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...

SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME

CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...

CONFORMAL TITANIUM NITRIDE-BASED THIN FILMS AND METHODS OF FORMING...

CONFORMAL TITANIUM SILICON NITRIDE-BASED THIN FILMS AND METHODS OF...

CONFORMAL TITANIUM SILICON NITRIDE-BASED THIN FILMS AND METHODS OF...

CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...

CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...

SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME

CONFORMAL TITANIUM NITRIDE-BASED THIN FILMS AND METHODS OF FORMING...

CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING...

METHOD AND APPARATUS FOR MODULATION OF PRECURSOR EXPOSURE DURING A...