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Bunya Matsui
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Kawasaki, JP
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last 30 patents
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Patent Grant
Impurity processing apparatus and method for cleaning impurity proc...
Patent number
6,435,196
Issue date
Aug 20, 2002
Canon Sales Co., Inc.
Noritada Satoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping system and plasma doping method
Patent number
6,403,410
Issue date
Jun 11, 2002
Canon Sales Co., Inc.
Kouichi Ohira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for formation of impurity region in semiconductor layer and...
Patent number
6,207,537
Issue date
Mar 27, 2001
Semiconductor Process Laboratory Co., Ltd.
Noritada Satoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device having a self-planari...
Patent number
5,286,681
Issue date
Feb 15, 1994
Canon Sales Co., Inc.
Kazuo Maeda
H01 - BASIC ELECTRIC ELEMENTS