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Burkhard Spill
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Ebsdorfergrund, DE
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last 30 patents
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Patent Application
Method for Selecting a Wavelength, and a Microscope
Publication number
20080062510
Publication date
Mar 13, 2008
Vistec Semiconductor Systems GmbH
Burkhard Spill
G02 - OPTICS
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Patent Application
Apparatus and method for the determination of positioning coordinat...
Publication number
20050225642
Publication date
Oct 13, 2005
Leica Microsystems Semiconductor GmbH
Burkhard Spill
G01 - MEASURING TESTING