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Burkhart SCHIER
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Klagenfurt, AT
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Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
Publication number
20240304489
Publication date
Sep 12, 2024
LAM RESEARCH AG
Burkhart SCHIER
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
Publication number
20230298928
Publication date
Sep 21, 2023
LAM RESEARCH AG
Michael BRUGGER
H01 - BASIC ELECTRIC ELEMENTS