Butch Berney

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor delivery head for preventing stiction of high aspect ratio st...
- Patent number 12,198,945
- Issue date Jan 14, 2025
- Lam Research AG
- Bhaskar Bandarapu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,861,719
- Issue date Dec 8, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,720,343
- Issue date Jul 21, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,679,871
- Issue date Jun 9, 2020
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and radiant heating plate for processing wafer-shaped art...
- Patent number 10,312,117
- Issue date Jun 4, 2019
- Lam Research AG
- Hongbo Si
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Minimizing arcing in a plasma processing chamber
- Patent number 7,611,640
- Issue date Nov 3, 2009
- Lam Research Corporation
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for minimizing arcing in a plasma processing...
- Patent number 7,086,347
- Issue date Aug 8, 2006
- Lam Research Corporation
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma downstream strip module
- Patent number 6,692,649
- Issue date Feb 17, 2004
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high density plasma chemical vapor deposition of dielect...
- Patent number 6,270,862
- Issue date Aug 7, 2001
- Lam Research Corporation
- Brian McMillin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Inductively coupled plasma downstream strip module
- Patent number 6,203,657
- Issue date Mar 20, 2001
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma CVD
- Patent number 6,184,158
- Issue date Feb 6, 2001
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable high temperature chuck for high density plasma chemical va...
- Patent number 5,835,334
- Issue date Nov 10, 1998
- Lam Research
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
- Publication number 20230131233
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Nathan Lavdovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
- Publication number 20210366738
- Publication date Nov 25, 2021
- LAM RESEARCH AG
- Bhaskar BANDARAPU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20200227284
- Publication date Jul 16, 2020
- LAM RESEARCH AG
- David MUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND RADIANT HEATING PLATE FOR PROCESSING WAFER-SHAPED ART...
- Publication number 20180047596
- Publication date Feb 15, 2018
- LAM RESEARCH AG
- Hongbo SI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20170345681
- Publication date Nov 30, 2017
- LAM RESEARCH AG
- David MUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled plasma downstream strip module
- Publication number 20040149223
- Publication date Aug 5, 2004
- Lam Research Corporation
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and methods for minimizing arcing in a plasma processing...
- Publication number 20030205327
- Publication date Nov 6, 2003
- Arthur M. Howald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled plasma downstream strip module
- Publication number 20010023741
- Publication date Sep 27, 2001
- Wenli Z. Collison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled plasma CVD
- Publication number 20010019903
- Publication date Sep 6, 2001
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Butch Berney

Person

Patents Grantslast 30 patents

Vapor delivery head for preventing stiction of high aspect ratio st...

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Apparatus and radiant heating plate for processing wafer-shaped art...

Minimizing arcing in a plasma processing chamber

Apparatus and methods for minimizing arcing in a plasma processing...

Inductively coupled plasma downstream strip module

Method for high density plasma chemical vapor deposition of dielect...

Inductively coupled plasma downstream strip module

Inductively coupled plasma CVD

Variable high temperature chuck for high density plasma chemical va...

Patents Applicationslast 30 patents

RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING

VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS AND RADIANT HEATING PLATE FOR PROCESSING WAFER-SHAPED ART...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

Inductively coupled plasma downstream strip module

Apparatus and methods for minimizing arcing in a plasma processing...

Inductively coupled plasma downstream strip module

Inductively coupled plasma CVD