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Butsurin JINNAI
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Mountain View, CA, US
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Patents Grants
last 30 patents
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Patent Grant
System, method and apparatus for ion milling in a plasma etch chamber
Patent number
9,899,227
Issue date
Feb 20, 2018
Lam Research Corporation
Joydeep Guha
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Waferless auto conditioning
Patent number
8,784,676
Issue date
Jul 22, 2014
Lam Research Corporation
Joydeep Guha
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SYSTEM, METHOD AND APPARATUS FOR ION MILLING IN A PLASMA ETCH CHAMBER
Publication number
20140235056
Publication date
Aug 21, 2014
LAM RESEARCH CORPORATION
Joydeep Guha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAYER-LAYER ETCH OF NON VOLATILE MATERIALS
Publication number
20130270227
Publication date
Oct 17, 2013
LAM RESEARCH CORPORATION
Joydeep GUHA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFERLESS AUTO CONDITIONING
Publication number
20130203255
Publication date
Aug 8, 2013
LAM RESEARCH CORPORATION
Joydeep GUHA
H01 - BASIC ELECTRIC ELEMENTS