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last 30 patents
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Patent Grant
System and method for simultaneous dark field and phase contrast in...
Patent number
9,726,615
Issue date
Aug 8, 2017
KLA-Tencor Corporation
Chuanyong Huang
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
System and Method for Simultaneous Dark Field and Phase Contrast In...
Publication number
20160025645
Publication date
Jan 28, 2016
KLA-Tencor Corporation
Chuanyong Huang
G01 - MEASURING TESTING