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Patents Grantslast 30 patents

Information Patent Grant
Combined segmented and nonsegmented bar-in-bar targets
- Patent number 6,128,089
- Issue date Oct 3, 2000
- International Business Machines Corporation
- Christopher P. Ausschnitt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for critical dimension and tool resolution det...
- Patent number 5,969,273
- Issue date Oct 19, 1999
- International Business Machines Corporation
- Charles N. Archie
- B82 - NANO-TECHNOLOGY