Byeong-sun An

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Suwon city, KR

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck
- Patent number 7,102,872
- Issue date Sep 5, 2006
- Samsung Electronics Co., Ltd.
- Jae-yong Cho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck
- Publication number 20050018377
- Publication date Jan 27, 2005
- Samsung Electronics Co., Ltd.
- Jae-yong Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck for wafer
- Publication number 20050018376
- Publication date Jan 27, 2005
- Samsung Electronics Co., Ltd.
- Jong-rok Park
- H01 - BASIC ELECTRIC ELEMENTS