Byeongsang KIM

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method of measuring parameters of plasma, apparatus for measuring p...
- Patent number 12,222,362
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- G01 - MEASURING TESTING
Information Patent Grant
Impedance measurement jig and method of controlling a substrate-pro...
- Patent number 12,210,045
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lift apparatus and substrate processing apparatus including the same
- Patent number 11,984,344
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting a semiconductor processing chamber using a vis...
- Patent number 11,538,701
- Issue date Dec 27, 2022
- Samsung Electronics Co., Ltd.
- Taehyoung Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electrostatic chuck and substrate processing apparatus including th...
- Patent number 11,404,252
- Issue date Aug 2, 2022
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot and substrate handling apparatus including the same
- Patent number 9,381,653
- Issue date Jul 5, 2016
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240167162
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Jihyeong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317418
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Jungmin KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BAKING APPARATUS
- Publication number 20230187236
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Wonguk Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
- Publication number 20230187178
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Youngil KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES
- Publication number 20230100582
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Yunhwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20230078095
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Dougyong SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
- Publication number 20230060400
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PRO...
- Publication number 20230010881
- Publication date Jan 12, 2023
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- G01 - MEASURING TESTING
Information Patent Application
LIFT APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20210159112
- Publication date May 27, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210111007
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting a semiconductor processing chamber using a vis...
- Publication number 20210013074
- Publication date Jan 14, 2021
- Samsung Electronics Co., Ltd.
- TAEHYOUNG LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR IMPRINT DEVICE AND OPERATING METHOD OF SEMICONDUCTOR...
- Publication number 20190361340
- Publication date Nov 28, 2019
- Samsung Electronics Co., Ltd.
- HO YU
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ROBOT AND SUBSTRATE HANDLING APPARATUS INCLUDING THE SAME
- Publication number 20150251323
- Publication date Sep 10, 2015
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Byeongsang KIM

Person

Patents Grantslast 30 patents

Method of measuring parameters of plasma, apparatus for measuring p...

Impedance measurement jig and method of controlling a substrate-pro...

Lift apparatus and substrate processing apparatus including the same

Method of inspecting a semiconductor processing chamber using a vis...

Electrostatic chuck and substrate processing apparatus including th...

Robot and substrate handling apparatus including the same

Patents Applicationslast 30 patents

SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING APPARATUS

WAFER BAKING APPARATUS

GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES

PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM

METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...

IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PRO...

LIFT APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...

Method of inspecting a semiconductor processing chamber using a vis...

SEMICONDUCTOR IMPRINT DEVICE AND OPERATING METHOD OF SEMICONDUCTOR...

ROBOT AND SUBSTRATE HANDLING APPARATUS INCLUDING THE SAME