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Byounghoon Lee
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Yongin-city, KR
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last 30 patents
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Patent Grant
Film formation method and apparatus for semiconductor process
Patent number
8,343,594
Issue date
Jan 1, 2013
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
Publication number
20080274302
Publication date
Nov 6, 2008
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film formation method and apparatus for semiconductor process
Publication number
20060207504
Publication date
Sep 21, 2006
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...