Byung-Jin Choi

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer process, apparatus and method of manufacturing an article
- Patent number 12,176,208
- Issue date Dec 24, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chuck assembly, planarization process, apparatus and method of manu...
- Patent number 12,165,903
- Issue date Dec 10, 2024
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Planarization process, apparatus and method of manufacturing an art...
- Patent number 12,138,747
- Issue date Nov 12, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus including arrays of pick-up heads and bonding heads and a...
- Patent number 12,131,926
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming apparatus, forming method, and article manufacturing method
- Patent number 12,044,962
- Issue date Jul 23, 2024
- Canon Kabushiki Kaisha
- Satoshi Iwatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planarization process, planarization system, and method of manufact...
- Patent number 12,027,373
- Issue date Jul 2, 2024
- Canon Kabushiki Kaisha
- Steven C. Shackleton
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Planarization system, planarization process, and method of manufact...
- Patent number 11,972,976
- Issue date Apr 30, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for loading a superstrate onto a superstrate chuck
- Patent number 11,964,421
- Issue date Apr 23, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Superstrate chuck, method of use, and method of manufacturing an ar...
- Patent number 11,776,840
- Issue date Oct 3, 2023
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method, system and apparatus for cooling a substrate
- Patent number 11,725,272
- Issue date Aug 15, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chuck assembly, planarization process, apparatus and method of manu...
- Patent number 11,728,203
- Issue date Aug 15, 2023
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Template for imprint lithography including a recession, an apparatu...
- Patent number 11,670,509
- Issue date Jun 6, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Edge exclusion apparatus and methods of using the same
- Patent number 11,664,220
- Issue date May 30, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Template replication
- Patent number 11,604,409
- Issue date Mar 14, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Nanofabrication method with correction of distortion within an impr...
- Patent number 11,567,401
- Issue date Jan 31, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for curing a shaped film
- Patent number 11,550,216
- Issue date Jan 10, 2023
- Canon Kabushiki Kaisha
- Anshuman Cherala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Template replication
- Patent number 11,454,883
- Issue date Sep 27, 2022
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of separating a template from a shaped film on a substrate
- Patent number 11,442,359
- Issue date Sep 13, 2022
- Canon Kabushiki Kaisha
- Tom H. Rafferty
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Alignment control in nanoimprint lithography using feedback and fee...
- Patent number 11,422,460
- Issue date Aug 23, 2022
- Canon Kabushiki Kaisha
- Mingji Lou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay improvement in nanoimprint lithography
- Patent number 11,347,144
- Issue date May 31, 2022
- Anshuman Cherala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for improving the performance of a nanoimprint sy...
- Patent number 11,249,405
- Issue date Feb 15, 2022
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Strain and kinetics control during separation phase of imprint process
- Patent number 11,161,280
- Issue date Nov 2, 2021
- Molecular Imprints, Inc.
- Niyaz Khusnatdinov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Planarization process, apparatus and method of manufacturing an art...
- Patent number 11,145,535
- Issue date Oct 12, 2021
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for separating a master template from a replica template
- Patent number 11,143,957
- Issue date Oct 12, 2021
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of imprinting a partial field
- Patent number 11,104,057
- Issue date Aug 31, 2021
- Canon Kabushiki Kaisha
- Mario Johannes Meissl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer process, apparatus and method of manufacturing an article
- Patent number 11,107,678
- Issue date Aug 31, 2021
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization process, apparatus and method of manufacturing an art...
- Patent number 11,043,407
- Issue date Jun 22, 2021
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization process, apparatus and method of manufacturing an art...
- Patent number 11,034,057
- Issue date Jun 15, 2021
- Canon Kabushiki Kaisha
- Ozkan Ozturk
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Safe separation for nano imprinting
- Patent number 11,020,894
- Issue date Jun 1, 2021
- Molecular Imprints, Inc.
- Se-Hyuk Im
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Real-time correction of template deformation in nanoimprint lithogr...
- Patent number 10,996,560
- Issue date May 4, 2021
- Canon Kabushiki Kaisha
- Anshuman Cherala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM INCLUDING AN ARRAY OF BONDING HEADS AND AN ARRAY OF DIE TRAN...
- Publication number 20250038030
- Publication date Jan 30, 2025
- CANON KABUSIKI KAISHA
- Byung-Jin CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION SYSTEM, PLANARIZING METHOD, AND METHOD OF MANUFACTURI...
- Publication number 20240429060
- Publication date Dec 26, 2024
- Canon Kabushiki Kaisha
- Steven C. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
- Publication number 20240419090
- Publication date Dec 19, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS INCLUDING A BONDING HEAD AND A METHOD OF USING THE SAME
- Publication number 20240404867
- Publication date Dec 5, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING APPARATUS, FORMING METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240337923
- Publication date Oct 10, 2024
- Canon Kabushiki Kaisha
- Satoshi Iwatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
- Publication number 20240321586
- Publication date Sep 26, 2024
- Canon Kabushiki Kaisha
- Steven C. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...
- Publication number 20240231220
- Publication date Jul 11, 2024
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS INCLUDING A NON-CONTACT DIE HEAD AND A SUBSTRATE CHUCK AN...
- Publication number 20240186157
- Publication date Jun 6, 2024
- Canon Kabushiki Kaisha
- Byung-Jin CHOI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS INCLUDING ARRAYS OF PICK-UP HEADS AND BONDING HEADS AND A...
- Publication number 20240153798
- Publication date May 9, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP CHUCK AND A METHOD OF USING THE SAME
- Publication number 20240153808
- Publication date May 9, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...
- Publication number 20240134270
- Publication date Apr 25, 2024
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS INCLUDING A PLURALITY OF HEADS AND A METHOD OF USING THE...
- Publication number 20240107735
- Publication date Mar 28, 2024
- Canon Kabushiki Kaisha
- Byung-Jin CHOI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...
- Publication number 20230373065
- Publication date Nov 23, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
- Publication number 20230335428
- Publication date Oct 19, 2023
- Canon Kabushiki Kaisha
- SETH J. BAMESBERGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
- Publication number 20230168592
- Publication date Jun 1, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYER FORMING SYSTEM INCLUDING COVER WITH SUPPORT PADS, A POSITIONI...
- Publication number 20230152688
- Publication date May 18, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE
- Publication number 20230137182
- Publication date May 4, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACU...
- Publication number 20230095200
- Publication date Mar 30, 2023
- Canon Kabushiki Kaisha
- Seth J. Bamesberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES, SYSTEMS, AND METHODS FOR THE TRANSFORMATION AND CROPPING O...
- Publication number 20230033557
- Publication date Feb 2, 2023
- Canon Kabushiki Kaisha
- Tom H. Rafferty
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TEMPLATE REPLICATION
- Publication number 20220390834
- Publication date Dec 8, 2022
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
- Publication number 20220384205
- Publication date Dec 1, 2022
- Canon Kabushiki Kaisha
- Steven C. Shackleton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION SYSTEM, PLANARIZATION PROCESS, AND METHOD OF MANUFACT...
- Publication number 20220352014
- Publication date Nov 3, 2022
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
- Publication number 20220115259
- Publication date Apr 14, 2022
- Canon Kabushiki Kaisha
- SETH J. BAMESBERGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE
- Publication number 20210358746
- Publication date Nov 18, 2021
- Canon Kabushiki Kaisha
- Byung-Jin CHOI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Nanofabrication Method with Correction of Distortion Within an Impr...
- Publication number 20210191257
- Publication date Jun 24, 2021
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT CONTROL IN NANOIMPRINT LITHOGRAPHY USING FEEDBACK AND FEE...
- Publication number 20210181622
- Publication date Jun 17, 2021
- Canon Kabushiki Kaisha
- Mingji Lou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE
- Publication number 20210159075
- Publication date May 27, 2021
- Canon Kabushiki Kaisha
- Byung-Jin CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Curing a Shaped Film
- Publication number 20210157229
- Publication date May 27, 2021
- Canon Kabushiki Kaisha
- Anshuman Cherala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERSTRATE CHUCK, METHOD OF USE, AND METHOD OF MANUFACTURING AN AR...
- Publication number 20210125855
- Publication date Apr 29, 2021
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE EXCLUSION APPARATUS AND METHODS OF USING THE SAME
- Publication number 20210104400
- Publication date Apr 8, 2021
- Canon Kabushiki Kaisha
- Byung-Jin CHOI
- H01 - BASIC ELECTRIC ELEMENTS

Byung-Jin Choi

Person

Patents Grantslast 30 patents

Wafer process, apparatus and method of manufacturing an article

Chuck assembly, planarization process, apparatus and method of manu...

Planarization process, apparatus and method of manufacturing an art...

Apparatus including arrays of pick-up heads and bonding heads and a...

Forming apparatus, forming method, and article manufacturing method

Planarization process, planarization system, and method of manufact...

Planarization system, planarization process, and method of manufact...

Method and system for loading a superstrate onto a superstrate chuck

Superstrate chuck, method of use, and method of manufacturing an ar...

Method, system and apparatus for cooling a substrate

Chuck assembly, planarization process, apparatus and method of manu...

Template for imprint lithography including a recession, an apparatu...

Edge exclusion apparatus and methods of using the same

Template replication

Nanofabrication method with correction of distortion within an impr...

Systems and methods for curing a shaped film

Template replication

Method of separating a template from a shaped film on a substrate

Alignment control in nanoimprint lithography using feedback and fee...

Overlay improvement in nanoimprint lithography

System and method for improving the performance of a nanoimprint sy...

Strain and kinetics control during separation phase of imprint process

Planarization process, apparatus and method of manufacturing an art...

Apparatus for separating a master template from a replica template

Imprint apparatus and method of imprinting a partial field

Wafer process, apparatus and method of manufacturing an article

Planarization process, apparatus and method of manufacturing an art...

Planarization process, apparatus and method of manufacturing an art...

Safe separation for nano imprinting

Real-time correction of template deformation in nanoimprint lithogr...

Patents Applicationslast 30 patents

SYSTEM INCLUDING AN ARRAY OF BONDING HEADS AND AN ARRAY OF DIE TRAN...

PLANARIZATION SYSTEM, PLANARIZING METHOD, AND METHOD OF MANUFACTURI...

REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL

APPARATUS INCLUDING A BONDING HEAD AND A METHOD OF USING THE SAME

FORMING APPARATUS, FORMING METHOD, AND ARTICLE MANUFACTURING METHOD

PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...

APPARATUS INCLUDING A NON-CONTACT DIE HEAD AND A SUBSTRATE CHUCK AN...

APPARATUS INCLUDING ARRAYS OF PICK-UP HEADS AND BONDING HEADS AND A...

CHIP CHUCK AND A METHOD OF USING THE SAME

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...

APPARATUS INCLUDING A PLURALITY OF HEADS AND A METHOD OF USING THE...

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...

CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...

REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL

LAYER FORMING SYSTEM INCLUDING COVER WITH SUPPORT PADS, A POSITIONI...

METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE

METHOD OF SHAPING A SURFACE, SHAPING SYSTEM, AND METHOD OF MANUFACU...

DEVICES, SYSTEMS, AND METHODS FOR THE TRANSFORMATION AND CROPPING O...

TEMPLATE REPLICATION

PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...

PLANARIZATION SYSTEM, PLANARIZATION PROCESS, AND METHOD OF MANUFACT...

CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...

WAFER PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

Nanofabrication Method with Correction of Distortion Within an Impr...

ALIGNMENT CONTROL IN NANOIMPRINT LITHOGRAPHY USING FEEDBACK AND FEE...

WAFER PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

Systems and Methods for Curing a Shaped Film

SUPERSTRATE CHUCK, METHOD OF USE, AND METHOD OF MANUFACTURING AN AR...

EDGE EXCLUSION APPARATUS AND METHODS OF USING THE SAME