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Byungkook KONG
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
EUV resist patterning using pulsed plasma
Patent number
10,847,368
Issue date
Nov 24, 2020
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform EUV photoresist patterning utilizing pulsed plasma process
Patent number
10,727,075
Issue date
Jul 28, 2020
Applied Materials, Inc.
Sang Wook Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device fabrication via pulsed plasma
Patent number
10,580,657
Issue date
Mar 3, 2020
Applied Materials, Inc.
Chang Wook Doh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device fabrication via pulsed plasma
Patent number
10,347,500
Issue date
Jul 9, 2019
Applied Materials, Inc.
Chang Wook Doh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming features in a silicon containing layer
Patent number
9,627,216
Issue date
Apr 18, 2017
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask passivation using plasma
Patent number
9,418,867
Issue date
Aug 16, 2016
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of removing residual polymers formed during a boron-doped a...
Patent number
9,390,923
Issue date
Jul 12, 2016
Applied Materials, Inc.
Jeong Hyun Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio plasma etch for 3D NAND semiconductor applications
Patent number
9,299,580
Issue date
Mar 29, 2016
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a boron doped carbon hardmask
Patent number
9,287,124
Issue date
Mar 15, 2016
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aspect ratio dependent etch (ARDE) lag reduction process by selecti...
Patent number
9,064,812
Issue date
Jun 23, 2015
Applied Materials, Inc.
Jinsu Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGHLY SELECTIVE SILICON ETCHING
Publication number
20230260802
Publication date
Aug 17, 2023
Applied Materials, Inc.
Daekyoung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FABRICATION VIA PULSED PLASMA
Publication number
20190371617
Publication date
Dec 5, 2019
Applied Materials, Inc.
Chang Wook DOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIFORM EUV PHOTORESIST PATTERNING UTILIZING PULSED PLASMA PROCESS
Publication number
20190198338
Publication date
Jun 27, 2019
Applied Materials, Inc.
Sang Wook KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV RESIST PATTERNING USING PULSED PLASMA
Publication number
20180292756
Publication date
Oct 11, 2018
Applied Materials, Inc.
Byungkook Kong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH ASPECT RATIO PLASMA ETCH FOR 3D NAND SEMICONDUCTOR APPLICATIONS
Publication number
20160056050
Publication date
Feb 25, 2016
Applied Materials, Inc.
Byungkook KONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF REMOVING RESIDUAL POLYMERS FORMED DURING A BORON-DOPED A...
Publication number
20160005602
Publication date
Jan 7, 2016
Applied Materials, Inc.
JEONG HYUN YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK PASSIVATION USING PLASMA
Publication number
20150200109
Publication date
Jul 16, 2015
Applied Materials, Inc.
Byungkook Kong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING FEATURES IN A SILICON CONTAINING LAYER
Publication number
20150099345
Publication date
Apr 9, 2015
Applied Materials, Inc.
BYUNGKOOK KONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING A BORON DOPED CARBON HARDMASK
Publication number
20150064914
Publication date
Mar 5, 2015
Applied Materials, Inc.
Byungkook KONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASPECT RATIO DEPENDENT ETCH (ARDE) LAG REDUCTION PROCESS BY SELECTI...
Publication number
20150064919
Publication date
Mar 5, 2015
Applied Materials, Inc.
Jinsu KIM
H01 - BASIC ELECTRIC ELEMENTS