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C. John Dickinson
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San Jose, CA, US
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last 30 patents
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Patent Grant
Substrate processing apparatus and related systems and methods
Patent number
6,846,380
Issue date
Jan 25, 2005
The BOC Group, Inc.
C. John Dickinson
B08 - CLEANING
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last 30 patents
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Patent Application
Substrate processing apparatus and related systems and methods
Publication number
20030232512
Publication date
Dec 18, 2003
C. John Dickinson
B08 - CLEANING