C. Randall Harwood

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Tempe, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Rinse water recycling in CMP apparatus
- Patent number 5,755,614
- Issue date May 26, 1998
- Integrated Process Equipment Corporation
- John A. Adams
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry recycling in CMP apparatus
- Patent number 5,664,990
- Issue date Sep 9, 1997
- Integrated Process Equipment Corp.
- John A. Adams
- B24 - GRINDING POLISHING