C. Robert KOEMTZOPOULOS

Person

Castro Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process for wafer temperature verification in etch tools
- Patent number 7,951,616
- Issue date May 31, 2011
- Lam Research Corporation
- Keren J. Kanarik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual doped polysilicon and silicon germanium etch
- Patent number 7,682,985
- Issue date Mar 23, 2010
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for hard mask CD trim
- Patent number 7,667,281
- Issue date Feb 23, 2010
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for hard mask CD trim
- Patent number 7,425,277
- Issue date Sep 16, 2008
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition system with a plasma chamber having separ...
- Patent number RE38097
- Issue date Apr 29, 2003
- Lam Research Corporation
- David Trussell
- 134 - Cleaning and liquid contact with solids
Information Patent Grant
Method of and apparatus for detecting and controlling in situ clean...
- Patent number 6,303,044
- Issue date Oct 16, 2001
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for precoating plasma CVD reactors
- Patent number 6,071,573
- Issue date Jun 6, 2000
- Lam Research Corporation
- C. Robert Koemtzopoulos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for detecting and controlling in situ clean...
- Patent number 6,017,414
- Issue date Jan 25, 2000
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processor
- Patent number 6,016,766
- Issue date Jan 25, 2000
- Lam Research Corporation
- David R. Pirkle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition system with a plasma chamber having separ...
- Patent number 5,988,187
- Issue date Nov 23, 1999
- Lam Research Corporation
- David Trussell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of in-situ cleaning of a chuck within a plasma chamber
- Patent number 5,911,833
- Issue date Jun 15, 1999
- Lam Research Corporation
- Dean Denison
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR WAFER TEMPERATURE VERIFICATION IN ETCH TOOLS
- Publication number 20100022033
- Publication date Jan 28, 2010
- LAM RESEARCH CORPORATION
- Keren J. KANARIK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Hard Mask CD Trim
- Publication number 20070249177
- Publication date Oct 25, 2007
- LAM RESEARCH CORPORATION
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual doped polysilicon and silicon germanium etch
- Publication number 20050205862
- Publication date Sep 22, 2005
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS

C. Robert KOEMTZOPOULOS

Person

Patents Grantslast 30 patents

Process for wafer temperature verification in etch tools

Dual doped polysilicon and silicon germanium etch

Method for hard mask CD trim

Method for hard mask CD trim

Chemical vapor deposition system with a plasma chamber having separ...

Method of and apparatus for detecting and controlling in situ clean...

Process for precoating plasma CVD reactors

Method of and apparatus for detecting and controlling in situ clean...

Microwave plasma processor

Chemical vapor deposition system with a plasma chamber having separ...

Method of in-situ cleaning of a chuck within a plasma chamber

Patents Applicationslast 30 patents

PROCESS FOR WAFER TEMPERATURE VERIFICATION IN ETCH TOOLS

Method for Hard Mask CD Trim

Dual doped polysilicon and silicon germanium etch