Cai Zhong TIAN

Person

Amagasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 8,293,067
- Issue date Oct 23, 2012
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,267,040
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 7,993,488
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D594485
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D593585
- Issue date Jun 2, 2009
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D589034
- Issue date Mar 24, 2009
- Tokyo Electron Limited
- Atsushi Ueda
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D572707
- Issue date Jul 8, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D572733
- Issue date Jul 8, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571831
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571832
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of plasma processing ap...
- Patent number D571833
- Issue date Jun 24, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Top panel for microwave introduction window of a plasma processing...
- Patent number D571383
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Kinya Ota
- D15 - Machines not elsewhere specified
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563951
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563949
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment
Information Patent Grant
Microwave introducing antenna for a plasma processing apparatus
- Patent number D563950
- Issue date Mar 11, 2008
- Tokyo Electron Limited
- Jun Yamashita
- D14 - Recording, communication, or information retrieval equipment

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20110265952
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20080006371
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Plasma Processing Method
- Publication number 20070264441
- Publication date Nov 15, 2007
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing unit
- Publication number 20050188922
- Publication date Sep 1, 2005
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS

Cai Zhong TIAN

Person

Patents Grantslast 30 patents

Microwave plasma processing device and gate valve for microwave pla...

Plasma processing apparatus and plasma processing method

Microwave plasma processing device and gate valve for microwave pla...

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of a plasma processing...

Top panel for microwave introduction window of plasma processing ap...

Top panel for microwave introduction window of a plasma processing...

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Microwave introducing antenna for a plasma processing apparatus

Patents Applicationslast 30 patents

MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...

MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...

Plasma Processing Apparatus and Plasma Processing Method

Plasma processing unit