Caijun Su

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San Jose, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET SOURCE TEMPERATURE MONITORING USING CONFOCAL SE...
- Publication number 20240201581
- Publication date Jun 20, 2024
- KLA Corporation
- Patrick Tae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Confocal Chromatic Metrology for EUV Source Condition Monitoring
- Publication number 20240090110
- Publication date Mar 14, 2024
- KLA Corporation
- Patrick Tae
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR