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Caiz Hong Tian
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Osaka City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for improving coupling between a surface wave pla...
Patent number
7,584,714
Issue date
Sep 8, 2009
Tokyo Electron Limited
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for treating a substrate
Patent number
7,268,084
Issue date
Sep 11, 2007
Tokyo Electron Limited
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface wave plasma processing system and method of using
Patent number
7,138,767
Issue date
Nov 21, 2006
Tokyo Electron Limited
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Surface wave plasma processing system and method of using
Publication number
20060071607
Publication date
Apr 6, 2006
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for improving coupling between a surface wave pla...
Publication number
20060065621
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing system for treating a substrate
Publication number
20060065367
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for treating a substrate
Publication number
20060065629
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS