Caleb MINSKY

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Medfield, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having a gas flow feature, and related methods
- Patent number 11,837,492
- Issue date Dec 5, 2023
- Entegris, Inc.
- Yan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with embossments that comprise diamond-like car...
- Patent number 11,612,972
- Issue date Mar 28, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
- Publication number 20240286398
- Publication date Aug 29, 2024
- Entegris, Inc.
- Chiranjeevi PYDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE
- Publication number 20230274967
- Publication date Aug 31, 2023
- Entegris, Inc.
- Jakub Rybczynski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES...
- Publication number 20230136703
- Publication date May 4, 2023
- Entegris, Inc.
- Yan Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
- Publication number 20230060192
- Publication date Mar 2, 2023
- Entegris, Inc.
- Chiranjeevi PYDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...
- Publication number 20220063035
- Publication date Mar 3, 2022
- Entegris, Inc.
- Yan LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
- Publication number 20210351061
- Publication date Nov 11, 2021
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS