Carey Phelps

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Hillsboro, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
- Patent number 12,100,574
- Issue date Sep 24, 2024
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TARGET AND ALGORITHM TO MEASURE OVERLAY BY MODELING BACK SCATTERING...
- Publication number 20220005668
- Publication date Jan 6, 2022
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS