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Carey W. Thiel

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  • South Burlington, VT, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING APPARATUS FOR SEMICONDUTOR FABRICATION
    • Publication number 20080093342
    • Publication date Apr 24, 2008
    • Timothy J. Dalton
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MASK REPAIR
    • Publication number 20060199082
    • Publication date Sep 7, 2006
    • International Business Machines Corporation
    • Philip S. Flanigan
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    ETCHING APPARATUS FOR SEMICONDUCTOR FABRICATION
    • Publication number 20060191638
    • Publication date Aug 31, 2006
    • International Business Machines Corporation
    • Timothy J. Dalton
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LIGHT SCATTERING EUVL MASK
    • Publication number 20050266317
    • Publication date Dec 1, 2005
    • International Business Machines Corporation
    • Emily E. Gallagher
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    METHOD FOR CONTROLLING LINEWIDTH IN ADVANCED LITHOGRAPHY MASKS USIN...
    • Publication number 20050106474
    • Publication date May 19, 2005
    • International Business Machines Corporation
    • Louis M. Kindt
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    Reflective mask structure and method of formation
    • Publication number 20040131947
    • Publication date Jul 8, 2004
    • International Business Machines Corporation
    • Emily Fisch Gallagher
    • B82 - NANO-TECHNOLOGY