Carl A. Woods

Person

Aptos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Controlled ambient system for interface engineering
- Patent number 9,117,860
- Issue date Aug 25, 2015
- Lam Research Corporation
- John Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,726,919
- Issue date May 20, 2014
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,567,421
- Issue date Oct 29, 2013
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Proximity substrate preparation sequence, and method, apparatus, an...
- Patent number 8,236,382
- Issue date Aug 7, 2012
- Lam Research Corporation
- Michael Ravkin
- B08 - CLEANING
Information Patent Grant
Proximity processing using controlled batch volume with an integrat...
- Patent number 8,221,608
- Issue date Jul 17, 2012
- Lam Research Corporation
- Carl A. Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for plating semiconductor wafers
- Patent number 8,048,283
- Issue date Nov 1, 2011
- Lam Research Corporation
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for uniformly applying a multi-phase cleaning...
- Patent number 7,913,703
- Issue date Mar 29, 2011
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for plating semiconductor wafers
- Patent number 7,862,693
- Issue date Jan 4, 2011
- Lam Research Corporation
- Yezdi N. Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wafer support apparatus for electroplating process and method for u...
- Patent number 7,828,951
- Issue date Nov 9, 2010
- Lam Research Corporation
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Proximity processing using controlled batch volume with an integrat...
- Patent number 7,811,423
- Issue date Oct 12, 2010
- Lam Research Corporation
- Carl A. Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Reducing mechanical resonance and improved distribution of fluids i...
- Patent number 7,811,424
- Issue date Oct 12, 2010
- Lam Research Corporation
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate gripper with integrated electrical contacts
- Patent number 7,780,825
- Issue date Aug 24, 2010
- Lam Research Corporation
- Aleksander Owczarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for transitioning a fluid meniscus to and from surfaces of...
- Patent number 7,731,802
- Issue date Jun 8, 2010
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for substrate processing in cluster tool configurations hav...
- Patent number 7,722,724
- Issue date May 25, 2010
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plating semiconductor wafers
- Patent number 7,704,367
- Issue date Apr 27, 2010
- Lam Research Corporation
- Yezdi Dordi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plating semiconductor wafers
- Patent number 7,645,364
- Issue date Jan 12, 2010
- Lam Research Corporation
- Yezdi N. Dordi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer support apparatus for electroplating process and method for u...
- Patent number 7,566,390
- Issue date Jul 28, 2009
- Lam Research Corporation
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate meniscus interface and methods for operation
- Patent number 7,513,262
- Issue date Apr 7, 2009
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-menisci processing apparatus
- Patent number 7,464,719
- Issue date Dec 16, 2008
- Lam Research Corporation
- James P. Garcia
- B08 - CLEANING
Information Patent Grant
System and method for producing bubble free liquids for nanometer s...
- Patent number 7,452,408
- Issue date Nov 18, 2008
- Lam Research Corporation
- Jeffrey J. Farber
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate proximity processing structures
- Patent number 7,406,972
- Issue date Aug 5, 2008
- Lam Research Corporation
- Carl Woods
- B08 - CLEANING
Information Patent Grant
System processing a substrate using dynamic liquid meniscus
- Patent number 7,395,611
- Issue date Jul 8, 2008
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Proximity meniscus manifold
- Patent number 7,389,783
- Issue date Jun 24, 2008
- Lam Research Corporation
- Carl Woods
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods for drying semiconductor wafer surfaces using a plurality o...
- Patent number 7,387,689
- Issue date Jun 17, 2008
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Meniscus, vacuum, IPA vapor, drying manifold
- Patent number 7,383,844
- Issue date Jun 10, 2008
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge wheel dry manifold
- Patent number 7,350,315
- Issue date Apr 1, 2008
- Lam Research Corporation
- Glenn W. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Meniscus proximity system for cleaning semiconductor substrate surf...
- Patent number 7,350,316
- Issue date Apr 1, 2008
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate proximity processing housing and insert for generating a...
- Patent number 7,293,571
- Issue date Nov 13, 2007
- Lam Research Corporation
- Carl Woods
- B08 - CLEANING
Information Patent Grant
System for substrate processing with meniscus, vacuum, IPA vapor, d...
- Patent number 7,240,679
- Issue date Jul 10, 2007
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for drying semiconductor wafer surfaces using...
- Patent number 7,234,477
- Issue date Jun 26, 2007
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...
- Publication number 20140202503
- Publication date Jul 24, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20140014146
- Publication date Jan 16, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20110132400
- Publication date Jun 9, 2011
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROXIMITY PROCESSING USING CONTROLLED BATCH VOLUME WITH AN INTEGRAT...
- Publication number 20110017605
- Publication date Jan 27, 2011
- Carl A. Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and Apparatus for Plating Semiconductor Wafers
- Publication number 20100170803
- Publication date Jul 8, 2010
- LAM RESEARCH CORPORATION
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for Plating Semiconductor Wafers
- Publication number 20090321250
- Publication date Dec 31, 2009
- Lam Research Corp.
- Yezdi N. Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Wafer Support Apparatus for Electroplating Process and Method for U...
- Publication number 20090260992
- Publication date Oct 22, 2009
- LAM RESEARCH CORPORATION
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS FOR TRANSITIONING A FLUID MENISCUS TO AND FROM SURFACES OF...
- Publication number 20090151753
- Publication date Jun 18, 2009
- Lam Research Corp.
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROXIMITY PROCESSING USING CONTROLLED BATCH VOLUME WITH AN INTEGRAT...
- Publication number 20080296166
- Publication date Dec 4, 2008
- Lam Research Corporation
- Carl A. Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE GRIPPER WITH INTEGRATED ELECTRICAL CONTACTS
- Publication number 20080289967
- Publication date Nov 27, 2008
- LAM RESEARCH CORPORATION
- Aleksander Owczarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for plating semiconductor wafers
- Publication number 20080271992
- Publication date Nov 6, 2008
- Lam Research Corp.
- Yezdi N. Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate proximity processing structures
- Publication number 20080006307
- Publication date Jan 10, 2008
- Lam Research Corp.
- Carl Woods
- B08 - CLEANING
Information Patent Application
Methods for substrate processing in cluster tool configurations hav...
- Publication number 20070235409
- Publication date Oct 11, 2007
- Lam Research Corp.
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY O...
- Publication number 20070218653
- Publication date Sep 20, 2007
- John M. de Larios
- B08 - CLEANING
Information Patent Application
MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURF...
- Publication number 20070107756
- Publication date May 17, 2007
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Meniscus, vacuum, IPA vapor, drying manifold
- Publication number 20070023070
- Publication date Feb 1, 2007
- Lam Research Corp.
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and systems for processing a substrate using a dynamic liqu...
- Publication number 20070011905
- Publication date Jan 18, 2007
- LAM RESEARCH CORPORATION
- James P. Garcia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
System and method for producing bubble free liquids for nanometer s...
- Publication number 20070000387
- Publication date Jan 4, 2007
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Multi-menisci processing apparatus
- Publication number 20060207636
- Publication date Sep 21, 2006
- Lam Research Corp.
- James P. Garcia
- B08 - CLEANING
Information Patent Application
Methods and systems for processing a substrate using a dynamic liqu...
- Publication number 20060150435
- Publication date Jul 13, 2006
- LAM RESEARCH CORPORATION
- James P. Garcia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Wafer support apparatus for electroplating process and method for u...
- Publication number 20060124451
- Publication date Jun 15, 2006
- LAM RESEARCH CORPORATION
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and systems for processing a bevel edge of a substrate usin...
- Publication number 20060081270
- Publication date Apr 20, 2006
- LAM RESEARCH CORPORATION
- Carl A. Woods
- B08 - CLEANING
Information Patent Application
Method and apparatus for plating semiconductor wafers
- Publication number 20050284767
- Publication date Dec 29, 2005
- LAM RESEARCH CORPORATION
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Proximity substrate preparation sequence, and method, apparatus, an...
- Publication number 20050158473
- Publication date Jul 21, 2005
- Lam Research Corp.
- Michael Raykin
- B08 - CLEANING
Information Patent Application
Substrate proximity processing structures and methods for using and...
- Publication number 20050148197
- Publication date Jul 7, 2005
- Lam Research Corp.
- Carl Woods
- B08 - CLEANING
Information Patent Application
Substrate meniscus interface and methods for operation
- Publication number 20050145268
- Publication date Jul 7, 2005
- Lam Research Corp.
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Proximity meniscus manifold
- Publication number 20050139318
- Publication date Jun 30, 2005
- Lam Research Corp.
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge dry manifold
- Publication number 20050132953
- Publication date Jun 23, 2005
- LAM RESEARCH CORPORATION
- Glenn W. Davis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cooling a resonator of a megasonic transducer
- Publication number 20040173238
- Publication date Sep 9, 2004
- LAM RESEARCH CORPORATION
- John M. Boyd
- B08 - CLEANING
Information Patent Application
Method and apparatus for fluid delivery to a backside of a substrate
- Publication number 20040144862
- Publication date Jul 29, 2004
- Lam Research Corporation
- John M. Boyd
- B08 - CLEANING

Carl A. Woods

Person

Patents Grantslast 30 patents

Controlled ambient system for interface engineering

Method and system for uniformly applying a multi-phase cleaning sol...

Method and system for uniformly applying a multi-phase cleaning sol...

Proximity substrate preparation sequence, and method, apparatus, an...

Proximity processing using controlled batch volume with an integrat...

Method and apparatus for plating semiconductor wafers

Method and apparatus for uniformly applying a multi-phase cleaning...

Apparatus for plating semiconductor wafers

Wafer support apparatus for electroplating process and method for u...

Proximity processing using controlled batch volume with an integrat...

Reducing mechanical resonance and improved distribution of fluids i...

Substrate gripper with integrated electrical contacts

Methods for transitioning a fluid meniscus to and from surfaces of...

Methods for substrate processing in cluster tool configurations hav...

Method and apparatus for plating semiconductor wafers

Apparatus and method for plating semiconductor wafers

Wafer support apparatus for electroplating process and method for u...

Substrate meniscus interface and methods for operation

Multi-menisci processing apparatus

System and method for producing bubble free liquids for nanometer s...

Substrate proximity processing structures

System processing a substrate using dynamic liquid meniscus

Proximity meniscus manifold

Methods for drying semiconductor wafer surfaces using a plurality o...

Meniscus, vacuum, IPA vapor, drying manifold

Edge wheel dry manifold

Meniscus proximity system for cleaning semiconductor substrate surf...

Substrate proximity processing housing and insert for generating a...

System for substrate processing with meniscus, vacuum, IPA vapor, d...

Method and apparatus for drying semiconductor wafer surfaces using...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

PROXIMITY PROCESSING USING CONTROLLED BATCH VOLUME WITH AN INTEGRAT...

Method and Apparatus for Plating Semiconductor Wafers

Apparatus for Plating Semiconductor Wafers

Wafer Support Apparatus for Electroplating Process and Method for U...

METHODS FOR TRANSITIONING A FLUID MENISCUS TO AND FROM SURFACES OF...

PROXIMITY PROCESSING USING CONTROLLED BATCH VOLUME WITH AN INTEGRAT...

SUBSTRATE GRIPPER WITH INTEGRATED ELECTRICAL CONTACTS

Apparatus and method for plating semiconductor wafers

Substrate proximity processing structures

Methods for substrate processing in cluster tool configurations hav...

METHODS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY O...

MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURF...

Meniscus, vacuum, IPA vapor, drying manifold

Methods and systems for processing a substrate using a dynamic liqu...

System and method for producing bubble free liquids for nanometer s...

Multi-menisci processing apparatus

Methods and systems for processing a substrate using a dynamic liqu...

Wafer support apparatus for electroplating process and method for u...

Methods and systems for processing a bevel edge of a substrate usin...

Method and apparatus for plating semiconductor wafers

Proximity substrate preparation sequence, and method, apparatus, an...

Substrate proximity processing structures and methods for using and...

Substrate meniscus interface and methods for operation

Proximity meniscus manifold

Edge dry manifold

Method and apparatus for cooling a resonator of a megasonic transducer

Method and apparatus for fluid delivery to a backside of a substrate