Carlo Cornelis Maria Luijten

Person

Duizel, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining a fingerprint of a performance...
- Patent number 11,194,258
- Issue date Dec 7, 2021
- ASML Netherlands B.V.
- Léon Maria Albertus Van Der Logt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and patterning devices and apparatuses for measuring focus...
- Patent number 11,054,754
- Issue date Jul 6, 2021
- ASML Netherlands B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement method, inspection apparatus, patterning device, lithog...
- Patent number 10,691,030
- Issue date Jun 23, 2020
- ASML Netherlands B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining a fingerprint of a performance...
- Patent number 10,649,342
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Léon Maria Albertus Van Der Logt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating focus measurements, measurement method and me...
- Patent number 10,571,812
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Fahong Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus, inspection method, lithographic apparatus and...
- Patent number 10,001,710
- Issue date Jun 19, 2018
- ASML Netherlands B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,823,590
- Issue date Nov 21, 2017
- ASML Netherlands B.V.
- Manish Ranjan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,625,835
- Issue date Apr 18, 2017
- ASML Netherlands B.V.
- Manish Ranjan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method of manufacturing a device
- Patent number 9,606,445
- Issue date Mar 28, 2017
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contamination trap for a lithographic apparatus
- Patent number 9,494,879
- Issue date Nov 15, 2016
- ASML Netherlands B.V.
- Carlo Cornelis Maria Luijten
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,427,629
- Issue date Apr 23, 2013
- ASML Netherlands B.V.
- Carlo Cornelis Maria Luijten
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods and Patterning Devices and Apparatuses for Measuring Focus...
- Publication number 20200142324
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Frank STAALS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A FINGERPRINT OF A PERFORMANCE...
- Publication number 20190324371
- Publication date Oct 24, 2019
- ASML NETHERLANDS B.V.
- Léon Maria Albertus VAN DER LOGT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT METHOD, INSPECTION APPARATUS, PATTERNING DEVICE, LITHOG...
- Publication number 20190171114
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Frank STAALS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Calibrating Focus Measurements, Measurement Method and Me...
- Publication number 20190056673
- Publication date Feb 21, 2019
- ASML NETHERLANDS B.V.
- Fahong LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170176877
- Publication date Jun 22, 2017
- ASML NETHERLANDS B.V.
- Manish Ranjan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Apparatus, Inspection Method, Lithographic Apparatus and...
- Publication number 20170023867
- Publication date Jan 26, 2017
- ASML NETHERLANDS B.V.
- Frank STAALS
- G01 - MEASURING TESTING
Information Patent Application
Substrate Support for a Lithographic Apparatus and Lithographic App...
- Publication number 20150331338
- Publication date Nov 19, 2015
- ASML NETHERLANDS B.V.
- Erik Johan ARLEMARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method of Manufacturing a Device
- Publication number 20150192861
- Publication date Jul 9, 2015
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Contamination Trap for a Lithographic Apparatus
- Publication number 20150138519
- Publication date May 21, 2015
- ASML NETHERLANDS B.V.
- Carlo Cornelis Maria Luijten
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150015856
- Publication date Jan 15, 2015
- ASML NETHERLANDS B.V.
- Manish Ranjan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20050151954
- Publication date Jul 14, 2005
- ASML NETHERLANDS B.V.
- Petrus Rutgerus Bartray
- G02 - OPTICS

Carlo Cornelis Maria Luijten

Person

Patents Grantslast 30 patents

Method and apparatus for determining a fingerprint of a performance...

Methods and patterning devices and apparatuses for measuring focus...

Measurement method, inspection apparatus, patterning device, lithog...

Method and apparatus for determining a fingerprint of a performance...

Method of calibrating focus measurements, measurement method and me...

Inspection apparatus, inspection method, lithographic apparatus and...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method of manufacturing a device

Contamination trap for a lithographic apparatus

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

Methods and Patterning Devices and Apparatuses for Measuring Focus...

METHOD AND APPARATUS FOR DETERMINING A FINGERPRINT OF A PERFORMANCE...

MEASUREMENT METHOD, INSPECTION APPARATUS, PATTERNING DEVICE, LITHOG...

Method of Calibrating Focus Measurements, Measurement Method and Me...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Inspection Apparatus, Inspection Method, Lithographic Apparatus and...

Substrate Support for a Lithographic Apparatus and Lithographic App...

Lithographic Apparatus and Method of Manufacturing a Device

Contamination Trap for a Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus and device manufacturing method