Carlo Waldfried

Person

Falls Church, VA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Conductive polymeric layers for charge dissipation
- Patent number 12,101,920
- Issue date Sep 24, 2024
- Entegris, Inc.
- Yuxuan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,084,778
- Issue date Sep 10, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttrium fluoride films and methods of preparing and using yttrium f...
- Patent number 12,031,212
- Issue date Jul 9, 2024
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,018,382
- Issue date Jun 25, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for applying a blanket polymer coating to a substrate
- Patent number 11,772,127
- Issue date Oct 3, 2023
- Entegris, Inc.
- Yan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface coating for chamber components used in plasma systems
- Patent number 11,764,037
- Issue date Sep 19, 2023
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,713,504
- Issue date Aug 1, 2023
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,390,943
- Issue date Jul 19, 2022
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for glass-shaping molds and molds comprising the same
- Patent number 10,882,774
- Issue date Jan 5, 2021
- Entegris, Inc.
- Troy Scoggins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer contact surface protrusion profile with improved particle per...
- Patent number 10,770,330
- Issue date Sep 8, 2020
- Entegris, Inc.
- John Michael Glasko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of making same
- Patent number 10,497,598
- Issue date Dec 3, 2019
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma mediated ashing processes that include formation of a protec...
- Patent number 9,128,382
- Issue date Sep 8, 2015
- Lam Research Corporation
- Ivan Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma apparatus, gas distribution assembly for a plasma apparatus...
- Patent number 8,580,076
- Issue date Nov 12, 2013
- Lam Research Corporation
- Alan Frederick Becknell
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Processes for curing silicon based low-k dielectric materials
- Patent number 8,338,315
- Issue date Dec 25, 2012
- Axcelis Technologies, Inc.
- Darren L. Moore
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Apparatus and process for treating dielectric materials
- Patent number 7,709,814
- Issue date May 4, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet assisted pore sealing of porous low k dielectric films
- Patent number 7,704,872
- Issue date Apr 27, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultraviolet assisted pore sealing of porous low k dielectric films
- Patent number 7,678,682
- Issue date Mar 16, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultraviolet assisted porogen removal and/or curing processes for fo...
- Patent number 7,629,272
- Issue date Dec 8, 2009
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ashing process for removing photoresist and residues during...
- Patent number 7,078,161
- Issue date Jul 18, 2006
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine-free plasma curing process for porous low-k materials
- Patent number 7,011,868
- Issue date Mar 14, 2006
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma ashing process
- Patent number 6,951,823
- Issue date Oct 4, 2005
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma curing process for porous low-k materials
- Patent number 6,913,796
- Issue date Jul 5, 2005
- Axcelis Technologies, Inc.
- Ralph Albano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process for removing polymer and residues from substrates
- Patent number 6,834,656
- Issue date Dec 28, 2004
- Axcelis Technology, Inc.
- Han Qingyuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma curing of MSQ-based porous low-k film materials
- Patent number 6,759,098
- Issue date Jul 6, 2004
- Axcelis Technologies, Inc.
- Qingyuan Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet curing processes for advanced low-k materials
- Patent number 6,756,085
- Issue date Jun 29, 2004
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma ashing process
- Patent number 6,630,406
- Issue date Oct 7, 2003
- Axcelis Technologies
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma curing process for porous silica thin film
- Patent number 6,558,755
- Issue date May 6, 2003
- Dow Corning Corporation
- Ivan L. Berry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ashing process
- Patent number 6,548,416
- Issue date Apr 15, 2003
- Axcelis Technolgoies, Inc.
- Qingyuan Han
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCKS AND RELATED METHODS
- Publication number 20240387225
- Publication date Nov 21, 2024
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE,...
- Publication number 20240344195
- Publication date Oct 17, 2024
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLES COATED WITH A FLUORO-ANNEALED FILM
- Publication number 20240337023
- Publication date Oct 10, 2024
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADDITIVE MANUFACTURED ARTICLES HAVING COATED SURFACES AND RELATED M...
- Publication number 20240239047
- Publication date Jul 18, 2024
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS
- Publication number 20230416913
- Publication date Dec 28, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING FOR CHAMBER COMPONENTS USED IN PLASMA SYSTEMS
- Publication number 20230386795
- Publication date Nov 30, 2023
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE POLYMERIC LAYERS FOR CHARGE DISSIPATION
- Publication number 20230337407
- Publication date Oct 19, 2023
- Entegris, Inc.
- Yuxuan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR
- Publication number 20230287564
- Publication date Sep 14, 2023
- Entegris, Inc.
- Bryan C. Hendrix
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE
- Publication number 20230274967
- Publication date Aug 31, 2023
- Entegris, Inc.
- Jakub Rybczynski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS
- Publication number 20230100791
- Publication date Mar 30, 2023
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADDITIVE MANUFACTURED ARTICLES HAVING COATED SURFACES AND RELATED M...
- Publication number 20230097687
- Publication date Mar 30, 2023
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADDITIVE MANUFACTURED ARTICLES HAVING PASSIVATED SURFACES AND RELAT...
- Publication number 20230093910
- Publication date Mar 30, 2023
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND RELATED METHODS AND STRUCTURES
- Publication number 20230084930
- Publication date Mar 16, 2023
- Entegris, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR APPLYING A BLANKET POLYMER COATING TO A SUBSTRATE
- Publication number 20230042148
- Publication date Feb 9, 2023
- Entegris, Inc.
- Yan Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...
- Publication number 20220316056
- Publication date Oct 6, 2022
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE WITH FLUORINATED YTTRIUM COATINGS, AND METHODS OF PREPARI...
- Publication number 20220298639
- Publication date Sep 22, 2022
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED...
- Publication number 20220208592
- Publication date Jun 30, 2022
- Entegris, Inc.
- Chandra VENKATRAMAN
- B22 - CASTING POWDER METALLURGY
Information Patent Application
COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE,...
- Publication number 20220010426
- Publication date Jan 13, 2022
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM F...
- Publication number 20210317572
- Publication date Oct 14, 2021
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL BODY HAVING MAGNESIUM FLUORIDE REGION FORMED THEREFROM
- Publication number 20210198788
- Publication date Jul 1, 2021
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFUSION BARRIERS MADE FROM MULTIPLE BARRIER MATERIALS, AND RELATE...
- Publication number 20210175325
- Publication date Jun 10, 2021
- Entegris, Inc.
- Carlo WALDFRIED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20200378011
- Publication date Dec 3, 2020
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...
- Publication number 20190185997
- Publication date Jun 20, 2019
- Entegris, Inc.
- I-Kuan LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20190100842
- Publication date Apr 4, 2019
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR GLASS-SHAPING MOLDS AND MOLDS COMPRISING THE SAME
- Publication number 20190084862
- Publication date Mar 21, 2019
- Entegris, Inc.
- Troy SCOGGINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CONTACT SURFACE PROTRUSION PROFILE WITH IMPROVED PARTICLE PER...
- Publication number 20190067069
- Publication date Feb 28, 2019
- Entegris, Inc.
- John Michael Glasko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARTICLES COATED WITH A FLUORO-ANNEALED FILM
- Publication number 20180202047
- Publication date Jul 19, 2018
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20180044800
- Publication date Feb 15, 2018
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING FOR CHAMBER COMPONENTS USED IN PLASMA SYSTEMS
- Publication number 20170032942
- Publication date Feb 2, 2017
- Entegris, Inc.
- Carlo WALDFRIED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Making Same
- Publication number 20160336210
- Publication date Nov 17, 2016
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Carlo Waldfried

Person

Patents Grantslast 30 patents

Conductive polymeric layers for charge dissipation

Coatings for enhancement of properties and performance of substrate...

Yttrium fluoride films and methods of preparing and using yttrium f...

Coatings for enhancement of properties and performance of substrate...

Methods for applying a blanket polymer coating to a substrate

Surface coating for chamber components used in plasma systems

Chemical resistant multi-layer coatings applied by atomic layer dep...

Chemical resistant multi-layer coatings applied by atomic layer dep...

Coatings for glass-shaping molds and molds comprising the same

Wafer contact surface protrusion profile with improved particle per...

Electrostatic chuck and method of making same

Plasma mediated ashing processes that include formation of a protec...

Plasma apparatus, gas distribution assembly for a plasma apparatus...

Processes for curing silicon based low-k dielectric materials

Apparatus and process for treating dielectric materials

Ultraviolet assisted pore sealing of porous low k dielectric films

Ultraviolet assisted pore sealing of porous low k dielectric films

Ultraviolet assisted porogen removal and/or curing processes for fo...

Plasma ashing process for removing photoresist and residues during...

Fluorine-free plasma curing process for porous low-k materials

Plasma ashing process

Plasma curing process for porous low-k materials

Plasma process for removing polymer and residues from substrates

Plasma curing of MSQ-based porous low-k film materials

Ultraviolet curing processes for advanced low-k materials

Plasma ashing process

Plasma curing process for porous silica thin film

Plasma ashing process

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCKS AND RELATED METHODS

COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE,...

ARTICLES COATED WITH A FLUORO-ANNEALED FILM

ADDITIVE MANUFACTURED ARTICLES HAVING COATED SURFACES AND RELATED M...

MODULES FOR DELIVERY SYSTEMS AND RELATED METHODS

SURFACE COATING FOR CHAMBER COMPONENTS USED IN PLASMA SYSTEMS

CONDUCTIVE POLYMERIC LAYERS FOR CHARGE DISSIPATION

DEVICES AND METHOD FOR DELIVERING MOLYBDENUM VAPOR

ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE

ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS

ADDITIVE MANUFACTURED ARTICLES HAVING COATED SURFACES AND RELATED M...

ADDITIVE MANUFACTURED ARTICLES HAVING PASSIVATED SURFACES AND RELAT...

ELECTROSTATIC CHUCK AND RELATED METHODS AND STRUCTURES

METHODS FOR APPLYING A BLANKET POLYMER COATING TO A SUBSTRATE

CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...

SUBSTRATE WITH FLUORINATED YTTRIUM COATINGS, AND METHODS OF PREPARI...

ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED...

COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE,...

YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM F...

METAL BODY HAVING MAGNESIUM FLUORIDE REGION FORMED THEREFROM

DIFFUSION BARRIERS MADE FROM MULTIPLE BARRIER MATERIALS, AND RELATE...

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

COATINGS FOR GLASS-SHAPING MOLDS AND MOLDS COMPRISING THE SAME

WAFER CONTACT SURFACE PROTRUSION PROFILE WITH IMPROVED PARTICLE PER...

ARTICLES COATED WITH A FLUORO-ANNEALED FILM

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

SURFACE COATING FOR CHAMBER COMPONENTS USED IN PLASMA SYSTEMS

Electrostatic Chuck and Method of Making Same