Carlos Leal-Verdugo

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System, method, and user interface for edge ring wear compensation
- Patent number 12,237,203
- Issue date Feb 25, 2025
- Lam Research Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for edge ring wear compensation
- Patent number 11,538,713
- Issue date Dec 27, 2022
- Lam Research Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 10,437,236
- Issue date Oct 8, 2019
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 9,716,022
- Issue date Jul 25, 2017
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM, METHOD, AND USER INTERFACE FOR EDGE RING WEAR COMPENSATION
- Publication number 20230083737
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Tom A. KAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR EDGE RING WEAR COMPENSATION
- Publication number 20200373193
- Publication date Nov 26, 2020
- LAM RESEARCH CORPORATION
- Tom A. KAMP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
- Publication number 20170322546
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
- Publication number 20150168962
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Ole Waldmann
- G05 - CONTROLLING REGULATING