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Carmen Jaehnert
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Dresden, DE
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last 30 patents
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Patent Grant
Method for dynamically monitoring a reticle
Patent number
7,304,721
Issue date
Dec 4, 2007
Infineon Technologies AG
Henning Haffner
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method for alleviating tolerance restrictions for feature sizes dur...
Publication number
20050214658
Publication date
Sep 29, 2005
Henning Haffner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Method for dynamically monitoring a reticle
Publication number
20050125164
Publication date
Jun 9, 2005
Henning Haffner
G01 - MEASURING TESTING