Carolus Ida Maria Antonius Spee

Person

Helmond, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Ex-situ removal of deposition on an optical element
- Patent number 8,134,136
- Issue date Mar 13, 2012
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Grant
Method of preparing components, prepared component, lithographic ap...
- Patent number 8,077,287
- Issue date Dec 13, 2011
- ASML Netherlands B.V.
- Johannes Adrianus Antonius Theodorus Dams
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus, lithographic apparatus and device manufacturing...
- Patent number 7,935,218
- Issue date May 3, 2011
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removal of deposition on an optical element, lithographi...
- Patent number 7,868,304
- Issue date Jan 11, 2011
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ex-situ removal of deposition on an optical element
- Patent number 7,767,989
- Issue date Aug 3, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Grant
Method for the removal of deposition on an optical element, method...
- Patent number 7,561,247
- Issue date Jul 14, 2009
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, coatings for exposure apparatus, lithographic a...
- Patent number 7,450,217
- Issue date Nov 11, 2008
- ASML Netherlands B.V.
- Arjen Boogaard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for the removal of deposition on an optical element, method...
- Patent number 7,414,700
- Issue date Aug 19, 2008
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for the removal of deposition on an optical element, method...
- Patent number 7,355,672
- Issue date Apr 8, 2008
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Device manufacturing method and a lithographic apparatus
- Patent number 7,075,617
- Issue date Jul 11, 2006
- ASML Netherlands B.V.
- Aleksey Yurievich Kolesnychenko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT
- Publication number 20120140196
- Publication date Jun 7, 2012
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- B08 - CLEANING
Information Patent Application
EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT
- Publication number 20100290015
- Publication date Nov 18, 2010
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- B08 - CLEANING
Information Patent Application
Method for removal of deposition on an optical element, lithographi...
- Publication number 20060175558
- Publication date Aug 10, 2006
- ASML NETHERLANDS B.V.
- Levinus Pieter Bakker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for the removal of deposition on an optical element, method...
- Publication number 20060115771
- Publication date Jun 1, 2006
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B08 - CLEANING
Information Patent Application
Method of preparing components, prepared component, lithographic ap...
- Publication number 20050008978
- Publication date Jan 13, 2005
- ASML NETHERLANDS B.V.
- Johannes Adrianus Antonius Theodorus Dams
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Carolus Ida Maria Antonius Spee

Person

Patents Grantslast 30 patents

Ex-situ removal of deposition on an optical element

Method of preparing components, prepared component, lithographic ap...

Optical apparatus, lithographic apparatus and device manufacturing...

Method for removal of deposition on an optical element, lithographi...

Ex-situ removal of deposition on an optical element

Method for the removal of deposition on an optical element, method...

Exposure apparatus, coatings for exposure apparatus, lithographic a...

Method for the removal of deposition on an optical element, method...

Method for the removal of deposition on an optical element, method...

Device manufacturing method and a lithographic apparatus

Patents Applicationslast 30 patents

EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT

EX-SITU REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT

Method for removal of deposition on an optical element, lithographi...

Method for the removal of deposition on an optical element, method...

Method of preparing components, prepared component, lithographic ap...